Vacuum decomposing apparatus for separating gallium arsenide as metal gallium and metal arsenic

Abstract

The invention discloses a vacuum decomposition device for separating gallium arsenide into metallic gallium and metallic arsenic. The decomposition device comprises a vacuum furnace body provided with a cooling device, wherein the inside of the vacuum furnace body is divided into a heating zone, a buffer zone and a cooling zone from bottom to top; the buffer zone is provided with an arsenic steam duct arranged on the upper part of the heating zone; the cooling zone is provided with an arsenic collection blind pipe linked with the arsenic steam duct; and the arsenic collection blind pipe is provided with a cooling device. The decomposition device has the advantages that the decomposition device can endure higher temperature than the prior quartz decomposition system; at a high temperature between 1,200 and 1,500 DEG C, the gallium arsenide decomposition rate of the device is almost 100 percent; and arsenic is efficiently collected, which eliminates pollution on environment and is beneficial to the subsequent utilization of the arsenic.

Description

technical field [0001] The invention relates to a vacuum separation device, in particular to a vacuum decomposition device for separating gallium arsenide into metal gallium and metal arsenic. Background technique [0002] Since sixty years, with the emergence of gallium arsenide compound semiconductors, gallium arsenide tailings have been left in the synthesis of gallium arsenide compound semiconductors, the preparation of single crystals, the production of wafers, and the preparation of devices. Therefore, people began to study the process of recovering gallium from gallium arsenide. There are mainly two recovery process ideas, which are briefly described as follows: [0003] Separation of gallium arsenide in quartz systems. Because gallium arsenide is synthesized in a quartz system, under vacuum conditions, at about 1230°C, arsenic vapor and metal gallium are synthesized into gallium arsenide. Therefore, the relevant units in our country have carried out the research wo...

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Problems solved by technology

The disadvantage of this method is that the decomposition rate of gallium arsenide is low, only about 60%; and the arsenic is not collected, causing environmental pollution

The disadvantage of this process is that, because gallium arsenide is relatively stable, it is more difficult to oxidize. In addition, the arsenic oxide produced after oxidation is a highly toxic substance, which is easy to cause environmental pollution during the operation process, and also increases the difficulty of the operator's work.

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