Porous member

Abstract

This invention provides a porous member that, when used in a field requiring a high level of cleanness, can suppress energy loss in a microwave band and can evenly disperse gas. The porous member is formed of a porous ceramic and has a dielectric loss tangent at a microwave band of not more than 1x10<-3>. A ceramic member comprising a ceramic sinter comprising this porous member in a part thereof is also provided.

Description

technical field [0001] The present invention relates to a porous member, which is used for parts and members used in environments requiring energy saving and uniform gas flow, such as dry preparation of electronic devices, manufacture of medical drugs, and food processing. Background technique [0002] With the improvement of the integration level of semiconductors, the miniaturization of design rules is progressing, and the size and number of allowable deposits and metal contamination are required to be reduced and reduced. [0003] On the other hand, as equipment for manufacturing semiconductors, in order to improve efficiency, a plasma excitation method based on microwaves has been adopted. Even in the fields of medicine and food, microwaves can be used in processes such as drying, and ceramics are usually used for these structures to prevent contamination from metals and the like. [0004] Here, as a semiconductor manufacturing facility, a microwave plasma processing de...

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Problems solved by technology

[0006] However, in parts using conventional porous members, the dielectric loss tangent of the material is large, which leads to microwave loss, plasma instability, and a decrease in the yield of semiconductor products.

Moreover, since the porosity and pore diameter cannot be sufficiently controlled, it is difficult to control a stable gas flow rate

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