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Solar selective absorption coating and preparation method thereof

An absorbing coating and selective technology, which is used in the production of vacuum devices and the production of high-temperature solar collector tubes, and can solve problems such as difficulty in using high-temperature solar collectors.

Inactive Publication Date: 2009-06-03
TSINGHUA UNIV +1
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

However, under non-vacuum conditions, it is difficult to use non-vacuum high-temperature solar collectors because metal particles react with active gases in the air, especially oxygen, under high-temperature conditions.

Method used

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  • Solar selective absorption coating and preparation method thereof
  • Solar selective absorption coating and preparation method thereof

Examples

Experimental program
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Embodiment 1

[0024] The material of the first metal cathode 5 is titanium, the material of the second metal cathode 6 is aluminum, and the material of the third metal cathode 7 is copper. The coating is divided into an infrared reflection layer 2, an absorption layer 3 and an anti-reflection layer 4 from the base 1 from bottom to top. The infrared reflective layer 2 adopts argon non-reactive sputtering of a copper film with a thickness of 100 nanometers; the end of the absorbing layer 3 close to the infrared reflective layer 2 is a conductive compound layer with a high metal volume ratio, and adopts argon and nitrogen reactive sputtering of the first metal The cathode 5 and the second metal cathode 6 form a TiN-AlN high metal volume ratio absorption layer. By adjusting the current and nitrogen flow, the TiN volume ratio is 0.8 and the thickness is 70 nanometers; the end of the absorption layer 3 away from the infrared reflection layer 2 is lower Insulating medium layer with metal volume ra...

Embodiment 2

[0026] The material of the first metal cathode 5 is zirconium, the material of the second metal cathode 6 is silicon, and the material of the third metal cathode 7 is aluminum. The coating is divided into an infrared reflection layer 2, an absorption layer 3 and an anti-reflection layer 4 from the base 1 from bottom to top. Infrared reflective layer 2 adopts argon gas non-reactive sputtering thickness to be 100 nanometers of aluminum film; Absorption layer 3 adopts argon gas, nitrogen gas reactive sputtering first metal cathode 5 and second metal cathode 6 to form ZrN-SiN absorption layer, then As the sputtering time increases, gradually reduce the zirconium cathode current, increase the aluminum cathode current and the nitrogen flow rate, so that the atomic ratio of ZrN gradually decreases from 100% at the end close to the substrate 1 to 10% at the end far away from the substrate 1, and the thickness is 160 nanometers; The second metal cathode 6 is reactively sputtered with a...

Embodiment 3

[0028] The material of the first metal cathode 5 is palladium, the material of the second metal cathode 6 is silicon, and the material of the third metal cathode 7 is copper. The coating is divided into an infrared reflection layer 2, an absorption layer 3 and an anti-reflection layer 4 from the base 1 from bottom to top. The infrared reflective layer 2 uses argon non-reactive sputtering of a copper film with a thickness of 100 nanometers; the absorption layer 3 uses argon and nitrogen reactive sputtering of the first metal cathode 5 and the second metal cathode 6 to form PdO-SiO 2 Absorbing layer, as the sputtering time increases, gradually reduce the zirconium cathode current, increase the aluminum cathode current and nitrogen flow, so that the atomic ratio of PdO gradually decreases from 100% at the end close to the substrate 1 to 10% at the end far away from the substrate 1, with a thickness of 180 Nano; the anti-reflection layer 4 uses argon, nitrogen reactive sputtering ...

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Abstract

The invention relates to a solar selective absorption coating and the preparation method thereof, which belong the technical field of vacuum device manufacture, in particular to the field of high-temperature solar collector tube manufacture. The coating comprises a solar collection element substrate, an IR reflection layer, an absorption layer and an antireflection layer, wherein the absorption layer adopts a mixture material containing a conductive compound and an insulation medium. The coating is prepared according to the step of sequentially sputtering the IR reflection layer, the absorption layer and the antireflection layer on the substrate by magnetron sputtering, wherein the absorption layer is sputtered by using two cathodes; and a first metal cathode reacts with a reaction gas to form the conductive compound and a second metal cathode reacts with the reaction gas to form the insulation medium under the sputtering condition of at least one reaction gas. The coating has better non-vacuum thermal stability, and can work stably for long term at room temperature to 500 DEG C under the non-vacuum condition.

Description

technical field [0001] A solar selective absorption coating and a preparation method thereof belong to the technical field of vacuum device production, especially the production field of high-temperature solar heat collection tubes. Background technique [0002] Solar thermal collector is the key device of solar heat utilization technology. According to different working temperatures, solar collectors can be divided into low temperature (<100°C), medium temperature (100~300°C) and high temperature (>300°C). At present, low-temperature solar collectors represented by solar water heaters have been widely used in my country. Medium and high temperature solar collectors can be widely used in solar air conditioning, seawater desalination, solar industrial heating and solar thermal power generation, and are an important development direction of solar energy utilization technology in the future. The solar vacuum heat collector tube is the core component of the solar collect...

Claims

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Application Information

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IPC IPC(8): C03C17/34
Inventor 王健李德杰齐京高元坤
Owner TSINGHUA UNIV