Method for removing native polysilicon bar end-face graphite
A polycrystalline silicon rod, polycrystalline silicon technology, applied in chemical instruments and methods, silicon compounds, inorganic chemistry, etc., to achieve ideal oxidation effect and easy operation.
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Embodiment 1
[0015] First knock down the raw materials with graphite chucks at both ends of the polysilicon rod, break the raw materials into small pieces, and separate the raw materials with carbon from those without carbon; then put the raw materials with carbon into quartz boats and put them in the muffle furnace Increase the temperature to 900°C at a rate of 10°C / min per minute, and keep the temperature constant for two hours. During the calcination process, ventilation holes should be left in the furnace cavity, and then cooled naturally; then the cooled raw materials are taken out of the furnace, and the surface of the raw materials is scraped off with a stainless steel knife The ashes of ashes; Get the mixed acid leaching raw material of sufficient amount of nitric acid and hydrofluoric acid again 4 minutes, the weight percentage concentration of nitric acid is 90%, the weight percentage concentration of hydrofluoric acid is 47%, the mixture of nitric acid and hydrofluoric acid The r...
Embodiment 2
[0017] First knock down the raw materials with graphite chucks at both ends of the polysilicon rod, break the raw materials into small pieces, and separate the raw materials with carbon from those without carbon; then put the raw materials with carbon into quartz boats and put them in the muffle furnace Increase the temperature to 920°C at a rate of 15°C / min per minute, keep the temperature for two hours, leave vents in the furnace cavity during the calcination process, and then cool naturally; then take the cooled raw materials out of the furnace, and scrape off the surface of the raw materials with a stainless steel knife The ashes of ashes; Get the mixed acid leaching raw material of sufficient amount of nitric acid and hydrofluoric acid again 5 minutes, the weight percent concentration of nitric acid is 70%, the weight percent concentration of hydrofluoric acid is 55%, the mixture of nitric acid and hydrofluoric acid The ratio of parts by weight is 10:1. All the raw materia...
Embodiment 3
[0019] First knock down the raw materials with graphite chucks at both ends of the polysilicon rod, break the raw materials into small pieces, and separate the raw materials with carbon from those without carbon; then put the raw materials with carbon into quartz boats and put them in the muffle furnace Increase the temperature to 880°C at a rate of 8°C / min per minute, and keep the temperature constant for two hours. During the calcination process, vents should be left in the furnace cavity, and then cooled naturally; then the cooled raw materials are taken out of the furnace, and the surface of the raw materials is scraped off with a stainless steel knife The ashes of ashes; Get the mixed acid leaching raw material of sufficient amount of nitric acid and hydrofluoric acid again 3 minutes, the weight percentage concentration of nitric acid is 98%, the weight percentage concentration of hydrofluoric acid is 35%, the mixture of nitric acid and hydrofluoric acid The ratio of parts...
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