Electrode for in-situ electrical measurement for diamond anvil cell and method for producing the same

Abstract

The invention discloses an in-situ electrical measuring electrode that is used in diamond-pair anvil cells and a manufacturing method thereof, and belongs to the technical field of high-temperature and high-voltage devices. Four electrodes (1) are deposited on the surface of a diamond anvil cell (8) and distribute from an anvil surface to a lateral surface of the diamond anvil cell (8); the electrodes (1) are diamond films doped with boron; a diamond insulating layer (2) covers the anvil surface and the lateral surface of the diamond anvil cell (8) as well as the electrodes (1) thereof; the electrodes (1) are exposed at one end of the anvil surface, the exposed position lies inside a sample cavity (9), and the electrodes (1) are exposed at one end of the lateral surface and connected with an electrode lead (5). A diamond film microcircuit and the diamond insulating layer are simultaneously integrated onto the surface of the diamond anvil cell by utilizing the film deposition technique, the nanometer seeding technique, the masking technique and the photolithographic method. The manufacturing method of the in-situ electrical measuring electrode prevents the electrode from being destroyed by transverse shearing force and overcomes the electrode corrosion by samples under the high-voltage condition, thus widening the research field of electrical in-situ measurement under high voltage.

Description

technical field [0001] The invention belongs to the technical field of high-temperature and high-pressure devices, and in particular relates to a boron-doped diamond film electrode used for in-situ electrical quantity measurement under high-temperature and high-pressure conditions of a diamond counter-anvil and a manufacturing method thereof. Background technique [0002] The diamond counter-anvil is currently the only high-pressure generating device capable of generating ultra-high pressure (>100GPa). Using it, people can study the change characteristics of various physical quantities of matter under ultra-high pressure, and the in-situ measurement of the electrical properties of matter is one of the important aspects. [0003] Stability has very strict requirements, that is, ① the electrode cannot break under high pressure environment, ② cannot chemically react with the measured substance, and ③ cannot produce serious deformation. [0004] The early high-voltage electr...

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Problems solved by technology

[0004] The early high-voltage electrical experiments on the diamond anvil all used metal wiring, and because the sample cavity was very narrow, it was very difficult to arrange the electrodes, and the electrodes themselves had to undergo serious deformation, making it impossible to measure the resistivity of the sample, etc. Electrical quantity

With the introduction of thin film deposition technology and micromachining technology, people directly deposit metal electrodes on the diamond

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