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Method for producing medlin plastic substrate flexible silicon-based film solar battery integrated component

A technology of polyimide and silicon-based thin films, applied in the direction of electrical components, final product manufacturing, sustainable manufacturing/processing, etc., can solve the problems of failure to achieve large-scale production, complex processing technology, high design, manufacturing, and maintenance costs problems, to achieve the effect of facilitating mass production, meeting social requirements, and reducing manufacturing costs

Inactive Publication Date: 2009-08-19
NANKAI UNIV
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Problems solved by technology

However, the equipment and processing technology required for this technology are complicated, and the design, manufacture, and maintenance costs are high, and it has not been able to achieve mass production so far.

Method used

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  • Method for producing medlin plastic substrate flexible silicon-based film solar battery integrated component

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Embodiment

[0020] Squeegee-coat polyimide slurry on a common glass substrate, cure it at 80°C for 2 hours, and then raise it to 200°C for chemical imidization to form a polyimide film with a film thickness of 50 μm; on glass / The ZnO transparent conductive film was sputtered on the polyimide substrate, the substrate temperature was 150°C, and the film thickness was 800nm; silane was used as the reaction source gas, and the glow excitation frequency was 13.56MHz by radio frequency plasma enhanced chemical vapor deposition method, according to Glass-substrate silicon-based thin-film solar cell preparation process to prepare single-junction pin amorphous silicon thin-film solar cells: the p layer is a-SiC:B:H thin film with a film thickness of 10nm, the i layer is a-Si:H thin film, and the film layer The thickness is 300nm, the n layer is a-Si:P:H film, the thickness of the film layer is 30nm, and the substrate temperature is 175°C; the aluminum back electrode is evaporated by evaporation me...

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Abstract

The invention discloses a method for manufacturing a flexible silicon-based thin-film solar battery integrated component with a polyimide plastic substrate; the method comprises the steps: polyimide slurry with good light transmittance is coated on ordinary glass and divided into two parts for low-temperature setting, thereby forming the glass-polyimide thin-film complex substrate; then, a battery component is formed in accordance with the technique for preparing a silicon-based thin-film solar battery component with a glass substrate; after a lead wire is packaged, the prepared solar battery component is soaked in water at room temperature so as to be removed from the glass and obtain the flexible battery integrated component with a plastic substrate. The method has the advantages that: the existing mature preparing equipment and processing technology of the silicon-based thin-film solar battery component with the glass substrate can be utilized to manufacture the novel flexible silicon-based thin-film solar battery integrated component with the plastic substrate, thus saving expensive design of flexible substrate solar battery equipment and technology, greatly reducing manufacturing costs and being beneficial to accelerating the industrialization process of the novel battery.

Description

【Technical field】 [0001] The invention relates to a thin-film solar cell manufacturing technology, in particular to a method for manufacturing a polyimide plastic substrate flexible silicon-based thin-film solar cell integrated assembly. 【Background technique】 [0002] Flexible thin film solar cells with plastic substrates have the advantages of light weight, easy bending, good plasticity, and high specific power. , It is an irreplaceable high specific power clean renewable energy product for space applications such as stratospheric balloon platforms, so it is called the third-generation space battery. [0003] Among flexible thin-film solar cells that use plastic as substrates, silicon-based thin-film flexible cells are the most feasible for large-area module production. Because most plastic substrates have poor temperature resistance, generally lower than 200°C, only silicon-based thin-film battery technology meets this requirement. However, silicon-based thin-film batte...

Claims

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Application Information

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IPC IPC(8): H01L31/18H01L31/02
CPCY02P70/50
Inventor 耿新华张建军倪牮陈新亮繁正海薛俊明侯国付赵颖
Owner NANKAI UNIV
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