Thin film type thermoelectric converter and a measuring method

A converter, thin-film technology, applied in thermoelectric device parts, measuring devices, measuring heat, etc., can solve the problems of the influence of the measurement results, and achieve the effect of reducing the influence of the measurement results

Inactive Publication Date: 2009-08-26
NAT INST OF METROLOGY CHINA
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Problems solved by technology

Since the thermocouple measures the temperature difference between the heating wire and the environment, the drift of the ambient temperature during the measurement will have a great impact on the measurement results

Method used

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  • Thin film type thermoelectric converter and a measuring method

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Embodiment Construction

[0022] like figure 1 Shown is a schematic structural view of a thin-film thermoelectric converter of the present invention. Among them, 1-thin-film thermoelectric converter substrate, 2-deep groove on the back of the substrate, 3-heater I, 4-heater II, 5-temperature probe I of thermocouple stack (for heater I), 6- Temperature probe II of the thermocouple stack (for heater II), 7-contact electrode.

[0023] A thin-film thermoelectric converter of the present invention uses a silicon wafer as a substrate 1, and uses a low-pressure chemical vapor phase epitaxy method to sequentially grow SiO on the front surface of the substrate 1 2 -Si 3 N 4 -SiO 2 Three-layer thin film sandwich structure, SiO 2 -Si 3 N 4 -SiO 2 The three-layer film interlayer covers the entire substrate 1, and the thickness of each layer is 100-500 microns. On the front side of the substrate 1, use the method of magnetron sputtering to deposit Cromel nickel-chromium alloy and constantan (a kind of copp...

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Abstract

The invention discloses a thin film type thermoelectric converter and a measuring method, relating to the electricity metrology technology. The thin film type thermoelectric converter comprises an SiO2-Si3N4-SiO2 three-layer thin film sandwich structure taking a silicon chip as substrate and growing on the substrate by the method of low pressure chemical vapor phase epitaxy, thermocouples, heaters and a contact electrode; wherein, two heaters are arranged on both sides of a thermocouple side by side. In the converter of the invention, when measuring, alternating current and direct current respectively flow through the two heaters at the same time; temperature difference caused by AC and DC power is output on the thermocouples and AC power and DC power are directly compared to ensure that the changes of the ambient temperature and temperature gradient have greatly reduced effects on the measuring results.

Description

technical field [0001] The invention relates to the technical field of electrical measurement, and relates to a thin-film thermoelectric converter and a measurement method, and is a core component of an AC-DC conversion standard. technical background [0002] AC-DC conversion standard is one of the basic standards of electrical measurement. With this standard, AC voltages and currents from 10Hz to 1MHz can be derived from the corresponding DC quantities and traced to an uncertainty better than 10 -8 The Josephson Quantum DC Voltage Reference. Generally, there are two ways for AC voltage standards to be derived from DC standards: one is to use a high-precision digital-to-analog converter to directly simulate the AC voltage waveform; the other is to convert electrical power into force or heat, by comparing the magnitude of force or temperature Variations to compare the electrical power of AC and DC voltages. In the second case, the converter is the reference standard, and s...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01R19/03G01K7/02H01L35/32H01L35/02
Inventor 钟青钟源贺青张江涛张钟华张德实李正坤鲁云峰赵建亭韩冰
Owner NAT INST OF METROLOGY CHINA
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