Plasma display panel manufacturing method and manufacturing device
A technology of plasma display and manufacturing method, which is applied in the direction of alternating current plasma display panel, discharge tube/lamp manufacturing, cold cathode manufacturing, etc., can solve problems such as unsatisfactory productivity and different conditions, shorten production cycle time, improve membrane characteristics, the effect of improving mask shift
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Embodiment 1
[0129] Figure 1 ~ Figure 3 Embodiments of the present invention are shown.
[0130] figure 1 A PDP manufacturing apparatus 41 according to an embodiment of the present invention is shown. Compared with conventional PDP manufacturing equipment ( Figure 10 ) compared to two heating and cooling chambers can be cut. figure 2 It is a figure of the electron beam evaporation source of this embodiment. image 3 It is a figure of the X-ray diffraction pattern of the MgO film formed using the PDP manufacturing apparatus of this embodiment. Figure 4 It is a graph of the film formation rate of the PDP manufacturing apparatus which concerns on embodiment of this invention.
[0131] like figure 1 As shown, the PDP manufacturing apparatus 41 of the embodiment of the present invention is composed of a loading chamber 42, a transfer chamber 43, a vapor deposition chamber 44, an extraction chamber 46, a front elevator 47, a rear elevator 49, and a substrate position 50. Such a heat...
Embodiment 2
[0144] Example 2 is an example in which the present invention is applied to an existing device.
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