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Silicon reclamation apparatus and method of reclaiming silicon

A recycling device and recycling method technology, applied in chemical instruments and methods, fine working devices, silicon, etc., can solve problems such as silicon shortage in solar cells

Inactive Publication Date: 2009-09-09
SHARP KK
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

As a result, silicon for solar cells has become in short supply

Method used

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  • Silicon reclamation apparatus and method of reclaiming silicon
  • Silicon reclamation apparatus and method of reclaiming silicon
  • Silicon reclamation apparatus and method of reclaiming silicon

Examples

Experimental program
Comparison scheme
Effect test

no. 1 approach

[0046] will use figure 1 The silicon recovery apparatus of the first embodiment of the present invention will be described. figure 1 It is a block diagram showing the structure of the silicon recovery apparatus of this embodiment.

[0047] Silicon recycling device of the present invention comprises following parts:

[0048] Solid-liquid separation part 1, which is used to obtain solid matter for silicon recovery containing silicon chips by solid-liquid separation of waste slurry or the concentrate of the waste slurry, wherein the waste slurry is a mixture of slurry and silicon a mixture of shavings obtained by cutting or polishing silicon blocks or silicon wafers using said slurry containing abrasive particles and coolant;

[0049] washing part 3, wherein the solid matter for silicon recovery is washed with an organic solvent; and

[0050]A classification section 5, wherein the solid matter for silicon recovery from the washing section is classified to obtain a silicon-cont...

no. 2 approach

[0117] Next, a silicon recovery device of a second embodiment of the present invention will be described. The structure of the silicon recovery device of this embodiment is similar to that of the first embodiment, but the difference lies in the objects to be processed. In the first embodiment the spent slurry itself undergoes treatment, but in the second embodiment the concentrate of the spent slurry undergoes treatment. The structure of the device of this embodiment is basically the same as that of the first embodiment, and the contents described in the first embodiment are basically applicable to this embodiment.

[0118] The "concentrate of waste slurry" refers to a substance obtained by concentrating the waste slurry before feeding the waste slurry to the silicon recovery apparatus of the present embodiment. The concentrate of spent slurry is usually in the form of a slurry or clay, but it can also be in other forms than these.

[0119]"Concentration of spent slurry" ref...

Embodiment

[0126] An example of a silicon recovery device and an example of a method of recovering silicon of the present invention will be described using specific numerical values. This example is where the use figure 1 and 2 An example of the recovery of silicon by the silicon recovery unit shown in , and will refer to figure 1 and 2 The invention is described.

[0127] In this example, waste slurry discharged from MWS was used in which slurry was formed by mixing abrasive particles in a coolant in a 1:1 weight ratio by adding propylene glycol to It is prepared by adding about 15% by weight of water (a dispersant to promote the dispersion of abrasive particles) and about 1% by weight of an organic acid as a pH regulator.

[0128] The waste slurry contains about 10 to 12% by weight of cutting chips made of silicon.

[0129] 1. Methods of recovering silicon

[0130] First, a method of recovering silicon will be described.

[0131] 1-1. Solid-liquid separation step

[0132] First...

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Abstract

The present invention discloses a silicon reclamation apparatus with which a large amount of silicon can be easily reclaimed from a waste slurry. The silicon reclamation apparatus comprises: a solid-liquid separation part in which either a waste slurry discharged from a cutting device or polishing device in which a slurry comprising abrasive grains and a coolant is used for silicon cutting or polishing or a waste slurry concentrate obtained by concentrating the waste slurry is subjected to solid-liquid separation to obtain solid substances for silicon recovery; a washing part in which the solid substances for silicon recovery are washed with an organic solvent; and a classification part in which the solid substances for silicon recovery after the washing are classified to obtain a silicon-containing powder having a higher silicon content than before the classification.

Description

technical field [0001] The present invention relates to a silicon recovery device and a method of recovering silicon for obtaining recovered silicon having a relatively high silicon content from waste slurry used in manufacturing steps of silicon wafers and the like. Background technique [0002] In a manufacturing step of a thin plate (hereinafter referred to as "silicon wafer") made of single crystal silicon or polycrystalline silicon widely used as a material for IC chips or solar cells, during silicon dicing, beveling or polishing, about 60% of the raw material silicon is discharged into the waste liquid, and thus, the influence on the product cost and the environmental burden related to silicon disposal (usually after concentrating the waste liquid or recovering part of the material from the waste liquid by landfill disposal) become Big question. [0003] Furthermore, especially in recent years, the production volume of solar cells has continued to increase and the dem...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C01B33/037B03C1/00B07B9/00C02F11/12C02F11/121
CPCC02F2101/10C02F11/121B28D5/007C01B33/02C01B33/037C02F1/38Y02P70/10
Inventor 梶本公彦北条义之
Owner SHARP KK
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