Method for directly preparing electronic grade phosphoric acid by yellow phosphorus

A technology of electronic grade phosphoric acid and yellow phosphorus, which is applied in the direction of phosphoric acid and phosphorus oxyacids, and can solve problems such as low product yield, high raw material requirements, and large equipment loss

Inactive Publication Date: 2009-09-16
YUNNAN CHEM RES INST
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

Phosphoric acid with high purity can be produced by these methods, but there are various problems such as high requirements for raw materials, high production cost, complex production process, difficult production control, large equipment loss, and unstable product quality.
For example, the cooling crystallization method that is currently used more often requires relatively pure phosphoric acid as a raw material. The process used is relatively complicated, and the product yield is low, which greatly increases the production cost.

Method used

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  • Method for directly preparing electronic grade phosphoric acid by yellow phosphorus

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0022] Rinse 1,200 kg of industrial yellow phosphorus with a purity of 99.93%, which contains 0.0133% arsenic, with ultra-pure water that meets GB / T 11446.1-1997’s first-class water standard for the electronics industry, and the delivery rate of industrial yellow phosphorus is 20-30kg / h Send it into the combustion tower for combustion, and at the same time, degreasing, impurity removal and humidity control are performed on the air entering the tower, and the moisture content of the air is controlled so that the molar ratio of moisture in the tower to phosphorus pentoxide produced by the reaction is 0.728. Under this condition, the P produced after the yellow phosphorus is fully burned 2 o 5 The gas is circulated and absorbed in the absorption tower with ultra-pure water that has reached the first-grade water standard for the electronics industry of GB / T 11446.1-1997. When the concentration of acid produced by absorption reaches 85.0%-87.0%, it is introduced into the acid post...

Embodiment 2

[0024] Rinse 5,000 kg of industrial yellow phosphorus with a purity of 99.96% and containing 0.0098% of arsenic in ultrapure water. The transport volume per hour is sent to the combustion tower for combustion, and the air entering the tower is treated with oil removal, impurity removal and humidity control, and the moisture content of the air is controlled so that the molar ratio of the moisture in the tower to the phosphorus pentoxide produced by the reaction Between 0.029-0.082. The P produced by the complete combustion of yellow phosphorus 2 o 5 The gas is circulated and absorbed in the absorption tower with ultra-pure water that has reached the secondary water standard for the electronics industry of GB / T 11446.1-1997. When the concentration of the acid produced by absorption reaches about 85.4%, it is introduced into the acid post-purification treatment system, and under the condition of 1000-level air purification environment, the anion and cation removal and filtratio...

Embodiment 3

[0026] Send 3,000 kg of industrial yellow phosphorus with a purity of 99.96%, which contains 0.0088% of arsenic, into the yellow phosphorus rinsing device, use ultrapure water for rinsing pretreatment, and then send it to the combustion tower for combustion at a delivery rate of 20-30kg / h. Filter, degrease and control the humidity of the air passing through the combustion tower, so that the molar ratio of water in the tower to the phosphorus pentoxide produced by the reaction is between 0.443-0.772. Under this condition, the yellow phosphorus can be fully burned, will generate P 2 o 5 The gas is passed into the absorption tower, and the ultrapure water is used for circulating absorption. When the concentration of the circulating acid reaches about 85.0%, it is sent to the acid purification treatment system, and the purification treatment of removing anions, cations, filtration, aeration and precision filtration is carried out in a 10,000-level air purification environment, an...

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Abstract

The invention provides a method for directly preparing electronic grade phosphoric acid by yellow phosphorus, relating to a preparation method of phosphoric acid, in particular to the preparation method of electronic grade phosphoric acid applied to the electronic industry; in the invention, industrial yellow phosphorus is used as the raw material, the method has the following steps: a. placing the industrial yellow phosphorus going through purifying pretreatment in a combustion tower; b. injecting air going through multilevel oil removal, edulcoration and humidity control into the industrial yellow phosphorus to facilitate sufficient burning thereof; c. sending P2O5 air generated by burning into an absorption tower, using ultrapure water for cycling absorption; d. sending a phosphoric acid purifying post treatment equipment for carrying out anion and cation desorption, aeration and multi-stage filtration purifying treatment after the concentration of the phosphoric acid generated by absorption reaches 85.0-87.0%; and d. purifying the processed phosphoric acid in the 10000-level or 1000-level air purification environment and packing product acid with a clean pail pack. The invention features easy control of production operation, good and relatively stable quality and low production cost.

Description

technical field [0001] The invention relates to a method for producing phosphoric acid, in particular to a method for producing electronic-grade phosphoric acid used in the electronics industry. Background technique [0002] Electronic grade phosphoric acid is widely used in the production of electronics industry, such as the production of various large-scale integrated circuits and liquid crystal displays, etc. It is mainly used in the preparation of corrosion liquid, etchant and cleaning agent in the production process, and is indispensable in the production of electronics industry. One of the important raw materials. The requirements for LCD grade electronic grade phosphoric acid are: phosphoric acid content (H 3 PO 4 ): 85.0%-87.0%, phosphorus pentoxide content (P 2 o 5 ): 61.6-63.0%, chroma (Hazeng) <10, easy to oxidize (with H 3 PO 3 meter)<20ppm, chloride (Cl)<1ppm, nitrate (NO 3 )<1ppm, sulfate (SO 4 )<10ppm, heavy metals<1ppm, arsenic (As)&...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C01B25/20
Inventor 梅毅杨亚斌马航莫宾
Owner YUNNAN CHEM RES INST
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