Laser discharge chamber device of gas CO2 laser

Abstract

The invention relates to a laser discharge chamber device of a gas CO2 laser, comprising a vertical plate at the right side of the chamber, a support frame plate on the chamber, an upper insulating frame plate on the chamber, an upper electrode plate, a ceramic insulating strip, an upper preionization triggering needle, a vertical plate at the left side of the chamber, a lower discharge electrode, the air inlet of a gas circulating path, a lower electrode plate, a lower preionization triggering needle, the air outlet of the gas circulating path, an end plate at the right side of the chamber and an end plate at the left side of the chamber. The device is characterized in that the laser discharge chamber is fixedly arranged on a sealed circulating work gas passage; electrical energy is injected by an energy-storing charge-discharge circuit so that the upper discharge electrode and the lower discharge electrode realizes even glow discharge in large area; and a plurality of pairs of upper ultraviolet light preionization triggering needles and lower ultraviolet light preionization triggering needles realize spark discharge to form the laser discharge chamber of the laser. The invention has small volume and compact structure, is convenient for repairing and installing the discharge electrode and the preionization triggering needles, leads a CO2 laser system to stably work for a long time so as to extend service life, and is fit for high-power gas lasers and pulse gas lasers.

Description

technical field

[0001] The invention relates to a gas laser, in particular to gas TEA CO with high voltage, high current, high pulse energy and high repetition rate 2 Laser discharge chamber device for lasers. Background technique

[0002] For continuous output CO 2 Laser or pulsed laser gas CO 2 All lasers require the laser discharge cavity to work in a uniform glow discharge state. In order to obtain higher power laser output, it is necessary to inject a large amount of electric energy into the laser discharge cavity through the energy storage charging and discharging system of the laser, and maintain a uniform field in the laser discharge cavity under a stable range of working gas pressure and high voltage and high current. Glow discharge to avoid the occurrence of arc discharge, which is a high-power gas CO 2 Lasers (especially pulsed gas CO 2 Laser) technology is difficult to solve the key problems. Due to the laser discharge process, there are transition factors ...

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