Preparation method of encoding microspheres
A technology for encoding microspheres and microspheres, applied in the field of biomedicine, can solve the problem of insufficiency of encoding capacity, etc., and achieve the effects of facilitating implementation, increasing capacity and reducing cost
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[0024] The steps of the method for preparing the encoded microspheres of the present invention and their beneficial effects will be further described in detail below in conjunction with several specific embodiments of the present invention and accompanying drawings:
[0025] The invention realizes the encoding function of the microsphere by preparing the microsphere with the micropattern through the microprocessing technology. Through a series of processes such as growth, deposition, etching, etc., microspheres are prepared on silicon wafers or other substrates, and through release, the microspheres are finally suspended in the solution. Describe the preparation method of the present invention below with the compound of silicon dioxide and silicon nitride as microsphere material, as figure 1 and figure 2 The flow chart of preparation method and process schematic diagram are as shown in:
[0026] Firstly, a first layer of photoresist 2 with a thickness of 1 μm is coated on a...
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