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Laser three-dimensional preparing method of non-spherical micro-lens

A laser three-dimensional, micro-lens technology, applied in the field of micro-manufacturing, can solve problems such as difficult to apply to the preparation of micro-optical components

Inactive Publication Date: 2009-10-07
JILIN UNIV
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

However, for obvious reasons, these methods are difficult to apply to the fabrication of extremely small micro-optical components.

Method used

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  • Laser three-dimensional preparing method of non-spherical micro-lens
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  • Laser three-dimensional preparing method of non-spherical micro-lens

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0052] (1) Using the Visual Basic programming language to compile the point cloud data of the spherical microlens model

[0053] Compile the microlens program of the ellipsoid, the base radius r of the ellipsoid is 10 μm, and the height H is 10.5 μm. First use the formula x 2 +y 2 +[0.95z+(r 2 +H 2 / 2H)-H] 2 =(r 2 +H 2 / 2H) 2 Obtain the microlens model shape (0<x, y≤r, 0<z≤H) of the ellipsoid defect. Then the model is sliced ​​horizontally (the slice thickness is 100nm). Each slice is composed of several circles with the same center and different radii (radius interval is 100nm). is 100nm), each tangent point in each slice is written into the point cloud data, and then the point cloud data of the ellipsoidal microlens model is obtained.

[0054] Create a microlens program with a parabolic sectional profile in the vertical direction. The radius r of the bottom surface of the microlens is 10 μm, and the height H is 10 μm. First use the formula z=-a(x 2 +y 2 )+H[a=0.0...

Embodiment 2

[0113] (1) Use the Visual C++ programming language to compile the point cloud data of the hexagonal aspheric microlens array model with a side length of 5 μm and different heights.

[0114] First use the formula z=-a(x 2 +y 2)+H[0<x, y≤5H is the height, a=H / 25] to obtain the shape of the aspheric microlens model, and then slice the model in the horizontal direction (slicing interval 100nm). Each slice is composed of several rings with the same center and different radii (radius interval 100nm), and each ring is composed of several tangent points (interval 100nm). For each tangent point in each slice, it is judged whether it is within the following In the equilateral hexagonal area with the center of the microlens as the center and the side length of the slice plane is 5 μm, if the point is in the hexagonal area, the point cloud data will be written, and if the point is not in the hexagonal area, it will not be written. The point cloud data of a hexagonal aspheric microlens m...

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Abstract

The present invention belongs to the technical field of micro-manufacturing, and specifically to a method for preparing non-spherical micro-lens and micro-lens array with laser three-dimensional processing. Firstly computer software is compiled for obtaining the point cloud data of non-spherical micro-lens model. Then the curable material is coated on the surface of hard substrate. Then the curable material is gradually scanned and solidified under the control of computer program through a laser three-dimensional processing system according to the point cloud data of non-spherical micro-lens model. The non-spherical micro-structure is obtained after developing. The micro-structure is used as a stencil. The non-spherical micro-lens and array of substrate material are obtained through etching. The method of the invention overcomes the boundary that a hot melting method only can prepare the spherical micro-lens and the diamond milling method is hard for preparing the micro-lens array. The non-spherical micro-lens and array with random profile in the vertical and horizontal direction can be obtained. 100% filling probability can be realized for the micro-lens array. Simultaneously the adjustable non-spherical micro-lens and array with the numerical aperture of 0-1 can be obtained.

Description

technical field [0001] The invention relates to a preparation method in the field of micro-manufacturing, in particular to a method for preparing an aspheric micro-lens and a micro-lens array by three-dimensional laser processing. technical background [0002] The term micro-optics was first proposed in 1981 by Yoshiji Uchida of NEC Corporation. At that time, it mainly referred to variable refractive index lenses and microlenses. After nearly 30 years of development, micro-optics has become an active branch of modern optics. The micro-optical elements at the core of micro-optics research include two categories: refractive and diffractive. The former mainly includes gradient index microlenses and arrays and ordinary microlenses and arrays; the latter mainly includes optimal phase elements, binary optical elements , Fresnel lens and grating structure, etc. Whether it is design theory or processing methods, micro-optics is completely different from traditional macro-optics, a...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G02B3/00G03F7/00
Inventor 孙洪波陈岐岱夏虹牛立刚吴东
Owner JILIN UNIV
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