Corrosion-resistance coating of polysilicon ingot furnace, high temperature resistance protective layer and preparation method thereof

A technology for polysilicon ingot casting furnaces and corrosion-resistant coatings, which is applied in anti-corrosion coatings, polycrystalline material growth, chemical instruments and methods, etc., can solve the problem of increased wear, affecting the heat insulation effect of carbon fiber heat insulation layers, and carbon fiber heat insulation layers Reduced density and other issues, to achieve the effect of reducing energy consumption, not easy to change, and preventing the accumulation of impurities

Inactive Publication Date: 2009-11-04
YINGLI ENERGY CHINA
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

However, when polysilicon is produced in a polysilicon ingot furnace, the raw materials for making polysilicon usually contain impurities. The carbon fiber heat insulation layer, especially the heat insulation layer of the simple action part, is easy to absorb tiny impurity particles as it is used, and then the carbon fiber will be mixed with impurities and silicon. The reaction occurs, which changes the original properties of the carbon fiber insulation layer, resulting in a decrease in the density of the carbon fiber insulation layer and increased wear, which affects the heat insulation effect of the carbon fiber insulation layer

Method used

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Examples

Experimental program
Comparison scheme
Effect test

preparation example Construction

[0053] The preparation steps of the high temperature resistant protective layer provided by the invention are as follows:

[0054] 1) After uniformly mixing the curing agent and the dispersing agent according to the proportion, apply it to the surface of the carbon fiber heat insulation layer under the condition of 10°C-100°C and relative humidity <90%.

[0055] 2) Put the mixture of carbon fiber powder and graphite powder, heat insulation material powder and film-forming agent into the disperser according to the proportion, mix thoroughly, and then apply to the surface of the carbon fiber heat insulation layer that has been coated with curing agent and dispersant. Apply evenly, the coating thickness is consistent, the coating thickness is about 3mm.

[0056] 3) Put the carbon fiber heat insulation layer coated with corrosion-resistant coating into a vacuum heating furnace, heat to 75°C-85°C in a vacuum state, and keep the temperature constant for 1.5-3 hours.

[0057] The hi...

Embodiment

[0059] The present invention prepares the step of high temperature resistant protective layer:

[0060] 1) Mix potassium fluorosilicate and tannic acid according to 1:1, put them into a disperser for stirring, the amount of potassium fluorosilicate and tannic acid is 2wt% of the corrosion-resistant coating, at 20 ℃, relative humidity Under the condition of 80%, the uniformly stirred mixture is applied to the surface of the carbon fiber heat insulation layer. The potassium fluorosilicate is a product of Changshu Xinhua Chemical Co., Ltd., and the tannin is a product of Jiangsu Yonghua Fine Chemical Co., Ltd. The product.

[0061] 2) Weigh the mixture of carbon fiber powder and graphite powder according to the content of 88% in the corrosion-resistant coating, the weight ratio of carbon fiber powder and graphite powder is 3:1, and the fiber length of the carbon fiber powder is 38 μm to 44 μm, which is Shanghai The product of Yingjia Special Fiber Material Co., Ltd., the particl...

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Abstract

The invention provides a corrosion-resistance coating of a polysilicon ingot furnace, a high temperature resistance protective layer and a preparation method thereof. The corrosion-resistance coating comprises the following components with the weight percentage: 85%-93% of mixture of carbon fibre powder and graphite powder, 1%-4% of film forming agent, 1%-3% of mixture of firming agent and dispersing agent, and 5%-12% of insulating material powder; the insulating material powder is one or two compounds of Sr3Ti2O7 and Sr4Ti3O7. The high temperature resistance protective layer comprises a carbon fibre thermal-protective coating and the corrosion-resistance coating covered on thereof. The corrosion-resistance coating of the invention causes the surface of the carbon fibre thermal-protective coating to be smooth, blocks the aggregation of impurities, has high temperature resistance and high strength, protects the carbon fibre thermal-protective coating not to be rusted, thus prolonging the service life of the carbon fibre thermal-protective coating.

Description

technical field [0001] The invention relates to the field of polysilicon, in particular to a corrosion-resistant coating used in a polysilicon ingot casting furnace, a high-temperature-resistant protective layer composed of the corrosion-resistant coating, and a preparation method for the high-temperature-resistant protective layer. Background technique [0002] With the rapid development of the semiconductor industry in today's world, VLSI is widely used, and high-purity and high-quality polysilicon is an important raw material for the production of semiconductor devices and integrated circuits. [0003] The polysilicon ingot furnace described herein is a special equipment for refining polysilicon well known to those skilled in the art. The innermost layer of the furnace wall of polysilicon ingot casting furnace is the working layer, and the temperature in the furnace is as high as 1560 degrees. The heat conduction effect of the growth block produces a polycrystalline sili...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C09D1/04C09D5/08C09D5/18C30B29/06C30B28/06B32B9/04B32B33/00
Inventor 王攀张运锋
Owner YINGLI ENERGY CHINA
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