Optical fiber vibration sensing head and manufacturing method thereof

Abstract

The invention discloses an optical fiber vibration sensing head, which consists of a vibration sensitive chip, a dual fiber collimator and an encapsulation shell, wherein the inside of the encapsulation shell under the dual fiber collimator is provided with a cavity, the vibration sensitive chip is arranged in the cavity and consists of micro light reflector, a silicon supporting frame and a substrate glass sheet; the silicon supporting frame is bonded with the substrate glass sheet; the micro light reflector is arranged in the silicon supporting frame; a damping air cavity is reserved between the micro light reflector and the substrate glass sheet; two sides of the micro light reflector is symmetrically provided with torsion shafts; and one end of each of the torsion shaft is connected with the silicon supporting frame. An MEMS process is used to integrate a MEMS vibration sensitive chip. Based on an asymmetric torsion micro light reflector structure, the MEMS vibration sensitive chip can be manufactured in batch. The torsion shafts are used as elastic elements, and the micro light reflector is used as a sensitive mass block to reflect vibration acceleration. The damping air cavity is used for controlling the damping characteristic of torsion. The invention has the advantages of batch production, low cost and high consistency.

Description

Technical field: [0001] The invention relates to the field of physics, in particular to light transmission technology, in particular to an optical fiber vibration sensor head and a manufacturing method thereof. Background technique: [0002] The vibration signal measured by the vibration sensor can be characterized by vibration acceleration or vibration amplitude. Therefore, the detection of vibration signals has two schemes: vibration detection based on vibration acceleration and vibration detection based on vibration amplitude. Vibration detection based on vibration acceleration is the main one. detection scheme. Vibration detection devices based on vibration acceleration include electrical detection vibration sensors and photoelectric detection vibration sensors. [0003] The electric detection vibration sensor uses a vibration sensitive mechanism to perceive vibration acceleration, and the vibration sensitive mechanism is mainly composed of a sensitive mass block, an el...

AI Technical Summary

Problems solved by technology

[0010] The object of the present invention is to provide an optical fiber vibration sensing head, which needs to solve the problem that in the prior art, the electrical detection vibration sensor is susceptible to electromagnetic interference, the light detection vibration sensor has a narrow frequency response range, and the wavelength resolution Difficult adjustment and complex assembly technical issues

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