Looking for breakthrough ideas for innovation challenges? Try Patsnap Eureka!

Production process for pressuring and condensing trichlorosilane synthesized product

A technology for synthesizing products, trichlorosilane, applied in the direction of silicon halide compounds, halosilanes, etc., can solve the problems of extended maintenance period, low condensation efficiency of synthetic products, and large refrigerant consumption, so as to improve condensation efficiency and reduce Refrigerant consumption and the effect of extending the service life

Inactive Publication Date: 2010-01-20
CHINA SILICON CORP LTD
View PDF1 Cites 5 Cited by
  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0007] In order to solve the above problems, the present invention provides a production process for pressurized condensation of trichlorosilane synthesis products. This production process effectively solves the problems of low condensation efficiency of synthesis products and high refrigerant consumption, and prolongs the life of the entire system. Maintenance cycle

Method used

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
View more

Image

Smart Image Click on the blue labels to locate them in the text.
Viewing Examples
Smart Image
  • Production process for pressuring and condensing trichlorosilane synthesized product

Examples

Experimental program
Comparison scheme
Effect test

Embodiment Construction

[0024] Explanation again: the trichlorosilane synthesis product described in the present invention refers to the mixed gas after the synthesis of industrial silicon powder and HCl, and the mixed gas contains H in addition to the dust. 2 , HCl, SiHCl 3 、SiH 2 Cl 2 or SiCl 4 Wait. The trichlorosilane synthesis product referred to herein may also refer to the mixed gas.

[0025] to combine figure 1 , the production process of the pressurized condensation of the trichlorosilane synthesis product of the present invention is a water cooler before compression, a deep cooler before compression, a hydrogen compressor, a deep cooler after compression, a synthetic product storage tank and a dry tail gas recovery system Implementation, the production process includes five processes of water cooling before compression, cryogenic cooling before compression, pressurization by hydrogen compressor, cryogenic cooling after compression and dry recovery of exhaust gas. The five processes are...

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to View More

PUM

No PUM Login to View More

Abstract

The invention discloses a production process for pressuring and condensing trichlorosilane synthesized products, which is implemented in a before-compression water cooler, a before-compression copious cooler, a hydrogen compressor, an after-compression copious cooler, a synthetic product storage tank and a tail gas dry-method recovery system. The production process comprises five processes of before-compression water cooling, before-compression copious cooling, hydrogen compressor pressuring, after-compression copious cooling and tail gas dry-method recovery. The invention effectively improves the condensation efficiency of the trichlorosilane synthesized product; after one-time pressuring and condensation, the recovery of chlorosilane is more than 90%; and then after being processed by the tail gas dry-method recovery system, the product is pressured and condensated once again, the condensation recovery of chlorosilane is more than 99%. The production process can reduce refrigerant consumption and extend the service cycle of hydrogen compressors.

Description

technical field [0001] The invention belongs to the technical field of chemical production, and in particular relates to a production process of pressurized condensation of a trichlorosilane synthesis product. Background technique [0002] Trichlorosilane is an important intermediate for the manufacture of silane coupling agents and other organosilicon products, and is also an important raw material for the preparation of semiconductor-grade polysilicon and solar-grade polysilicon. With the increasing international and domestic demand for polysilicon, the stable supply of high-quality and large-volume trichlorosilane is particularly important. [0003] The synthesis of trichlorosilane mostly adopts atmospheric pressure synthesis process, the production capacity of a single equipment and the utilization rate of raw materials are low, and the system configuration is not perfect, such as no special liquid chlorine vaporization system, no liquid chlorine or hydrogen chloride deh...

Claims

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to View More

Application Information

Patent Timeline
no application Login to View More
Patent Type & Authority Applications(China)
IPC IPC(8): C01B33/107
Inventor 严大洲肖荣晖毋克力杜俊平
Owner CHINA SILICON CORP LTD
Who we serve
  • R&D Engineer
  • R&D Manager
  • IP Professional
Why Patsnap Eureka
  • Industry Leading Data Capabilities
  • Powerful AI technology
  • Patent DNA Extraction
Social media
Patsnap Eureka Blog
Learn More
PatSnap group products

Browse by: Latest US Patents, China's latest patents, Technical Efficacy Thesaurus, Application Domain, Technology Topic, Popular Technical Reports.

© 2024 PatSnap. All rights reserved.Legal|Privacy policy|Modern Slavery Act Transparency Statement|Sitemap|About US| Contact US: help@patsnap.com