Low power consumption electro-optical modulator with silicon-based cascade resonator structure

Abstract

The invention discloses a low power consumption electro-optical modulator with a silicon-based cascade resonator structure, which is formed by serially connecting two Fabry-Perot resonant cavities (4)manufactured on an silicon-on-insulator (SOI) substrate on an insulator, wherein the two Fabry-Perot resonant cavities (4) are serially connected by adopting a form of cursor cascade to form a low power consumption electro-optical modulator with a cascade resonator structure. Each Fabry-Perot resonant cavity (4) consists of two Bragg gratings (3) and a ridge waveguide (1) positioned between the two Bragg gratings, and the Bragg gratings (3) are taken as reflecting mirrors of the Fabry-Perot resonant cavities (4). The low power consumption electro-optical modulator greatly improves parametersof the resonant cavities such as F values, FSR, Q values and the like, ensures that the extinction ratio of the electro-optical modulator is greatly increased, needs lower power consumption for the modulation, and has quicker speed; a device has a compact structure; and the production technology is compatible with a mature microelectronic CMOS process.

Description

technical field [0001] The invention relates to the field of silicon-based optoelectronics, in particular to a silicon-based cascaded resonant cavity structure low-power electro-optic modulator that can improve the extinction ratio and response rate. Background technique [0002] As the size of microelectronic devices continues to shrink, the performance of traditional microelectronic devices is gradually approaching the physical limit. Optical interconnection is the most promising way to solve the bottleneck of electrical interconnection. An essential way of interconnection, the optical modulator is one of the important devices of optoelectronic integration and photonic integrated circuit. Due to cost and technical considerations, silicon-based materials are most likely to become a commercial optoelectronic integration platform. [0003] Electro-optic modulators made of silicon-based materials are compatible with mature CMOS processes and realize large-scale photonic integ...

AI Technical Summary

Problems solved by technology

At present, there are electro-optic modulators based on a single F-P resonator, but because the F-P resonator has only one-dimensional limitation on the light wave, the Q value of the F-P resonator is not as high as that of the microring and microdisk resonators, so the performance such as extinction ratio and speed is not high. very high

Images