Non-contact scroll saw guide wheel slot type detector

Abstract

The invention discloses a non-contact scroll saw guide wheel slot type detector, comprising a seat body for supporting a workpiece to be measured, an imaging lens and a computer processing element, wherein a CCD imaging lens is arranged above the workpiece to be measured corresponding to the side face of the seat body; a high-brightness white light LED adjustable light source and an X-axis and Y-axis measuring liner scale are arranged below the workpiece to be measured corresponding to the side face of the seat body; the imaging lens is fixed on the liner rail arranged on the seat body; and the trend of the rail is parallel to the axle center of the workpiece to be measured. When in measurement, the detector leads the central direction of the imaging camera to be tangent to the surface ofthe workpiece to be measured, projection imaging is carried out on the surface groove profile of the workpiece to be measured, the image can be amplified by processing of computer program after imaging to be displayed on software operator interface, therefore, the imaging on the workpiece is amplified for scores even hundreds of times after the above processes; in addition, a user can label multiterms of data such as groove spacing, angle, groove profile depth and the like of the workpiece to be measured according to image analysis software, and flaws on the surface of the workpiece to be measured can also be amplified and displayed on software interface, thereby being convenient for a client to detect and trace the quality of products.

Description

technical field [0001] The invention relates to a groove type detector for cutting steel wire lead wheels used in silicon chip cutting equipment in the semiconductor and solar photovoltaic industries, and can also be used for the detection of thread shapes and sizes in other mechanical processing fields. Background technique [0002] For the detection of the groove shape of the cutting steel wire guide wheel of the silicon wafer cutting equipment in the semiconductor and solar photovoltaic industries, the commonly used measuring equipment is the measuring tool of the traditional mechanical structure, such as a profile measuring instrument, etc., due to the groove surface of the wire saw guide wheel itself It is very small, and the distance between the grooves is generally less than 0.4 mm, so it is difficult to measure with ordinary measuring equipment, and the accuracy of the measurement results is poor, and the precision is also low. Especially for the parts with tiny flaw...

AI Technical Summary

Problems solved by technology

[0003] The purpose of the present invention is to provide a non-contact wire saw guide wheel groove type detection high-precision testing instrument to solve the problems of low measurement accuracy and difficult measurement of traditional measuring tools

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