Single-mode quantum cascaded laser linear array structure

Abstract

A single-mode quantum cascaded laser linear array structure is characterized in that: the structure comprises a substrate, a plurality of crestiform units, an isolation layer, an upper ohmic contact layer and a lower ohmic contact layer. The plurality of crestiform units are sequentially arranged on the substrate longitudinally to form a crestiform structure column; the isolation layer is arrangedon the surfaces of the plurality of crestiform units and the substrate, and is disconnected on the upper surfaces of the plurality of crestiform units to form an electrical injection window; the upper ohmic contact layer is arranged on the isolation layer and the electrical injection window; and the lower ohmic contact layer is arranged on the lower surface of the substrate.

Description

technical field [0001] The invention relates to the technical field of semiconductors, in particular to a single-mode quantum cascade laser line array structure. Background technique [0002] The 3-5 micron and 8-14 micron bands are very important atmospheric windows, which cover the NO 2 , CO 2 , CO and other gas characteristic peaks. These spectral features can be applied to air pollution monitoring, industrial dust analysis, chemical process monitoring, trace gas monitoring, molecular spectroscopy research, medical diagnosis, anti-jamming radar, and infrared optical wireless communication. The emission wavelength of the quantum cascade laser is located in the mid-to-far infrared band, covering these two atmospheric windows. It is the perfect product of the combination of energy band engineering design and molecular beam epitaxy technology. [0003] A quantum cascade laser is a unipolar semiconductor light source based on electronic transitions between subbands in the s...

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Problems solved by technology

[0004] At present, quantum cascade lasers that realize dynamic single-mode operation are mainly distributed feedback quantum cascade lasers. During the production process, gratings must be prepared and secondary epitaxial growth is performed, and the process is very complicated.

For F-P cavity lasers, the longitudinal film spacing (where λ 0 is the lasing wavelength of the laser, n e is the effective refractive index, L is the cavity length of the laser), and the longitudinal mode spacing increases with the shrinkage of the device cavity length, so the longitudinal mode spacing can be increased by shortening the device cavity length, so that only one main mode appears in the gain region mode, to achieve the single-mode operation of the laser, but the output power of the short-cavity single-mode quantum cascade laser produced by this method is very low due to the large loss

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