Combined push rod mechanism

Abstract

The invention discloses a combined push rod mechanism, which comprises a vertical lifting device, a support plate and at least three groups of push rod assemblies. The vertical lifting device is connected with the support plate; one end of the push rod assembly is symmetrically connected to the support plate, and the other end of the push rod assembly hermetically extends into a vacuum cavity; the push rod assembly comprises a push rod, an elastic element, a fixed shaft and a shaft sleeve, wherein the shaft sleeve is provided with a stroke cavity with a hollow structure, the stroke cavity runs through the shaft sleeve, the upper end of the shaft sleeve extends into the vacuum cavity and is hermetically pivoted with the vacuum cavity, the upper end of the fixed shaft extends into the stroke cavity at the lower end of the shaft sleeve and is connected by screw thread, and the lower end of the fixed shaft is fixedly connected with the support plate; the push rod is sleeved in the stroke cavity, extends out of the upper end of the shaft sleeve and is blocked with the stroke cavity; and the elastic element is supported between the fixed shaft and the push rod in a compression state and is accommodated in the stroke cavity. The combined push rod mechanism is used for lifting an article in the vacuum cavity during OLED production, has functions of buffering and absorbing shock, can ensure high cleanness of evaporation equipment, and has simple structure and convenient maintenance.

Description

technical field [0001] The invention relates to a ejector mechanism, in particular to a combined ejector mechanism which is suitable for lifting objects in a vacuum chamber and has a buffer function. Background technique [0002] Organic Light-Emitting Diode (OLED, Organic Light-Emitting Diode) is a new display technology with great potential, because of its simple pure solid-state device structure and its excellent image quality, plus self-illumination, no viewing angle barrier, low temperature characteristics Good and other advantages, OLED display has been considered as the most valuable new generation of flat panel display after liquid crystal display and plasma display. Most OLED manufacturing processes use ITO (indium tin oxide) glass as the substrate, and use evaporation equipment to successively deposit multi-layer films on the glass substrate. Hole injection layer, hole transport layer, light-emitting layer, electron transport layer and electron injection layer, an...

AI Technical Summary

Problems solved by technology

When the existing ejector mechanism is in use, power sources such as cylinders or motors will be introduced into the vacuum evaporation equipment, which will inevitably bring pollution from the equipment itself to the vacuum environment and affect the evaporation effect; in addition, the existing The ejector mechanism rarely has the function of cushioning and vibration reduction, and direct hard mechanical contact is likely to cause damage to the supported and / or separated objects, reducing the yield of the product; at the same time, the maintenance and repair of this type of ejector mechanism is quite inconvenient

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