Plasma etching machine and ejector pin thereof

Abstract

The invention relates to an ejector pin of a plasma etching machine, which comprises an insulating outer shell and a conductive central pin arranged in the insulating outer shell, wherein the conductive central pin can contact a substrate directly to remove residual static on the substrate when jacking the substrate; the insulating outer shell is provided with an anti-corrosion and high-impedance protective layer; and the conductive central pin can be further provided with a safety groove to prevent a lower electrode from being damaged, and also can be provided with a wrench fixing groove to fix the ejector pin conveniently. The plasma etching machine comprises an upper electrode, the lower electrode, a lifting device arranged below the lower electrode and a plurality of ejector pins, wherein the ejector pins are arranged on the lifting device. The ejector pin can guide the static remaining on the substrate and the lower electrode to a grounding circuit, and prevent the glass substrate from being damaged due to the static.

Description

technical field [0001] The invention relates to a plasma etching device, in particular to a plasma etching machine and ejection pins thereof. Background technique [0002] With the progress of optical technology and semiconductor technology, liquid crystal display (Liquid Crystal Display; LCD) has been widely used in display devices of electronic products. Liquid crystal display has the advantages of high image quality, small size, light weight, low voltage drive, low power consumption and wide application range, so it has been widely used in portable TVs, mobile phones, video recorders, notebook computers In consumer electronics or computer products such as , desktop monitors, and projection TVs, it has become the mainstream of displays. [0003] Generally, the main body of a liquid crystal display is a liquid crystal unit, which is mainly composed of two transparent substrates and a liquid crystal sealed between the substrates. At present, liquid crystal displays are mai...

AI Technical Summary

Problems solved by technology

However, due to the long-term use of the lower electrode, deposits of products are easily formed around the embossment on its surface.

This product will cause capacitive effect, so that static electricity will accumulate on the surface of the lower electrode, so that when the glass substrate is in contact with the lower electrode, it will cause damage to the glass substrate

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