Annular radiation type blazed grating
A blazed grating and radiation-type technology, which is applied in the field of spatial optical interconnection, binary optics and micro-optics, to achieve good market prospects, high diffraction efficiency and extensive social benefits
Inactive Publication Date: 2011-08-17
TIANJIN UNIV
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Problems solved by technology
[0005] At present, there is no ring grating whose grating groove teeth are distributed circumferentially and radially, which can deflect the incident light along the radial direction perpendicular to the ring
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[0019] The realization principle of the technical solution of the present invention is: etching M blazed grating groove teeth on an annular grating substrate, each grating groove tooth has the same parameter, and is periodically arranged at 2π / M rad on the circumference. The projection of each grating tooth on the upper surface is a radian of 2π / M rad, and the radius is from r 0 to r 1 fan-shaped. Each grating tooth on the inner and outer circumference r 0 、r 1 The end face of is a circumferential surface or a plane, because the beam is mainly at r 0 to r 1 Incident on the radius of , so the requirements for the boundary are not high. By designing the blaze angle of the grating, the desired beam deflection angle can be obtained. The contour of the upper surface of the substrate after etching is a conical surface, and the conical surface is in contact with the top of each grating tooth.
[0020] The methods for realizing the grating include ion beam milling, photolithogr...
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The present invention relates to an annular radiation type blazed grating which comprises an annular grating baseplate, blazed grating teeth (3) and diffraction surfaces (4), wherein the blazed grating teeth (3) are etched on the annular grating baseplate, and the diffraction surfaces (4) are positioned at one side of notched ridge lines (2) of the blazed grating teeth. The annular radiation type blazed grating is characterized in that the blazed grating teeth (3) are periodically arranged on the circumference of the annular grating baseplate, each blazed grating tooth (3) is in a radiation type, the projection of the upper surface of the annular grating baseplate is fan-shaped, and the bottommost parts of scale marks on the blazed grating teeth (3) are positioned on a plane (6); the diffraction surfaces (4) of the blazed grating teeth (3) are larger planes on one side of the notched ridge lines (2); and a plane formed from straight lines (11) and (12) perpendicular to the notched ridge lines(2) of the blazed grating teeth and the plane (6) intersect at a straight line (13), the straight line (13) and each diffraction surface (4) form a blaze angle (14), and the blaze angle (14) is unchanged for each blazed grating tooth. Compared with the prior art, the annular radiation type blazed grating has the beam deflection performance which other round or annular blazed gratings do not have, and the annular radiation type blazed grating is convenient to manufacture and has the characteristic of high diffraction effect. On the aspect of economic benefit, the annular radiation type blazed grating can be widely applied to occasions needing beam deflection, spectral analysis and the like, particularly to the deflection of revolving beams.
Description
technical field [0001] The invention relates to the technical fields of spatial optical interconnection, binary optics and micro-optics, in particular to a novel grating structure. Background technique [0002] The application of grating technology provides a new platform for the development of modern sensing, optical focusing, beam deflection, spectral technology, etc., especially the invention of the blazed grating, which uses a certain angle between the groove surface of the blazed grating and the grating surface, so that The central main maximum of single groove surface diffraction is separated from the interference zero-order main maximum between multi-groove surfaces, and the light energy is transferred from the interference zero-order main maximum to a certain order of diffraction, so that the diffraction efficiency of the grating is significantly improved. [0003] At present, conventional blazed gratings, such as the gratings mentioned in patents CN200810069913.3 an...
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IPC IPC(8): G02B5/18
Inventor 贾大功胡百泉张红霞张以谟井文才
Owner TIANJIN UNIV