Method of glass surface fine processing

A microfabrication and glass surface technology, which is applied to the photoplate-making process of the patterned surface, metal processing equipment, and machine tools suitable for grinding workpiece planes, etc., can solve the problems of difficult and effective mechanical mirror finishing, and achieve the reduction of cracks and The effect of the appearance of transverse cracks

Active Publication Date: 2012-07-04
AGC INC
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  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

Therefore, it is difficult to effectively perform mechanical mirror finishing

Method used

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  • Method of glass surface fine processing
  • Method of glass surface fine processing
  • Method of glass surface fine processing

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0078] First, aluminum lithium silicate glass is prepared as glass. The glass is ground with a ceria slurry or a colloidal silica slurry in order to obtain an average surface roughness below 10 nm.

[0079] Subsequently, mask the given area with Kapton tape.

[0080] The glass was then immersed in an aqueous solution of nitric acid adjusted to a pH of 2 for 30 minutes at room temperature. Thus, the alkali removal process is performed on the area not covered with the mask. In the region not covered with the mask (the region subjected to the alkali removal treatment), alkali ions diffuse out from the region near the glass surface, and the surface is slightly etched. As a result, the region subjected to the alkali removal treatment becomes to have a smaller glass thickness than the masked region (region not subjected to the alkali removal treatment) in terms of the glass thickness measured from the back surface of the glass. The glass thickness in the region where the alkali r...

Embodiment 2

[0084] The same glass as in Example 1 was prepared, and an area in the glass was covered with Kapton tape in the same manner as in Example 1.

[0085] Subsequently, the glass was immersed in an aqueous solution of nitric acid adjusted to pH 2 for 30 minutes. The impregnation was carried out at 40° C. different from that in Example 1. Thus, the alkali removal process is performed on the area not covered with the mask. As in Example 1, in the region where the alkali removal treatment was performed, alkali ions diffused from the region near the glass surface, and the surface was slightly corroded. As a result, the glass thickness in the region where the alkali removal treatment had been performed was different from that in the region where the alkali removal treatment had not been performed by 30 nm.

[0086] The Kapton tape was then peeled off as in Example 1.

[0087] Subsequently, as in Example 1, the glass was ground using a colloidal silica slurry. This milling was perfo...

Embodiment 3

[0089] In the alkali removal treatment, the relationship between leaching, in particular where glass is immersed in an acidic solution, and glass composition, immersion time, temperature, and pH value was examined.

[0090] First, four kinds of glasses having various compositions shown in Table 1 were prepared. In Table 1, the compositions are shown in mol%.

[0091] Table 1

[0092] Glass

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Abstract

The present invention relates to a method of glass surface fine processing for forming a convex portion on a surface of a glass containing alkali-metal oxides, the method including: a step of coating a surface of a first region adjacent to a surface of a second region which is to be a convex portion, with a protective layer; a step of removing alkali ions from the surface of the second region; a step of removing the protective layer from the surface of the first region; and a step of polishing the surface of the second region from which the alkali ions have been removed and the surface of thefirst region from which the protective layer has been removed.

Description

technical field [0001] The present invention relates to a microfabrication method for forming recesses and protrusions on a glass surface. More specifically, the present invention relates to a glass surface microfabrication method in which not only microscale but also nanoscale microfabrication can be performed. Background technique [0002] Glass is chemically stable, has a low coefficient of thermal expansion, and has excellent physical and chemical properties. Therefore, glass is suitable as a material for chemical reaction chips, optical components, and electronic components. However, since glass is a brittle material on the one hand, it is difficult to perform mirror finishing without cracks and chips by mechanical removal processes such as grinding and cutting. For mirror finishing of glass, the processing rate must be reduced and a high level of processing technology is required. Therefore, it is difficult to effectively perform mechanical mirror finishing. [000...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): C03C15/00G03F7/00
CPCB24B1/00G11B5/8404C03C19/00C03C2218/34B24B13/00C03C21/006B24B7/24
Inventor 下平宪昭堀江满伊藤正文
Owner AGC INC
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