Unlock instant, AI-driven research and patent intelligence for your innovation.

Method for manufacturing silicon solar cells

A technology of silicon solar cells and manufacturing methods, applied in the direction of final product manufacturing, sustainable manufacturing/processing, circuits, etc., can solve the problems of reduced production efficiency, low production efficiency, and expensive investment in lithography equipment, and achieve low production costs, The effect of high production efficiency

Active Publication Date: 2010-06-30
BEIJING NAURA MICROELECTRONICS EQUIP CO LTD
View PDF0 Cites 6 Cited by
  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

Photolithography technology can realize precise graphic structures, and is mostly used in the field of integrated circuits and liquid crystal panel manufacturing. The investment of lithography equipment is expensive and the production efficiency is low.
[0007] In the production process of silicon solar cells, the precision of the graphics is not high, and the formation of graphics by photolithography will lead to unnecessary increases in production costs and reduced production efficiency.

Method used

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
View more

Image

Smart Image Click on the blue labels to locate them in the text.
Viewing Examples
Smart Image
  • Method for manufacturing silicon solar cells
  • Method for manufacturing silicon solar cells

Examples

Experimental program
Comparison scheme
Effect test

specific Embodiment

[0024] Specific examples, such as figure 1 shown, including the following steps:

[0025] Step 1. Cleaning:

[0026] Select a low-resistance N-type monocrystalline silicon wafer as the substrate 1, with a thickness of about 200-250um, and remove the damaged layer on the surface of the silicon wafer with KOH or NaOH solution;

[0027] Step 2, N-type doping:

[0028] Put the substrate 1 processed in step 1 in a high-temperature diffusion furnace, and pass through POCl 3 1. Doping the front and back sides of the substrate 1 to form N-type doped layers 2 and 5 on the front and back sides, and the sheet resistance is controlled between 10-60Ω / □.

[0029] Step 3. Growing SiO 2 Floor:

[0030] After doping, a layer of SiO is thermally oxidized on both sides of the substrate 1 2 Layer 6 has a thickness between 3nm and 10nm.

[0031] Step 4. Corrosion of SiO 2 :

[0032] SiO on the back side of substrate 1 2 On layer 6, etchant is printed by printing process, etched to form p...

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to View More

PUM

No PUM Login to View More

Abstract

The invention discloses a method for manufacturing silicon solar cells, comprising the following steps: carrying out N type or P type doping at the back of an N type silicon substrate to form an N type or P type doped layer and growing an SiO2 layer on the outer layer of the doped layer; printing a corrodent or corrosion preventive on the SiO2 layer at the back through printing technology, corroding needed graphics by the corrodent and exposing the N type silicon substrate; carrying out P type or N type doping on the exposed N type silicon substrate to form a P type or N type doped region; then corroding through holes on the SiO2 layer at the back for extracting electrodes; and corroding the front into textured structure and depositing an antireflection layer on the textured structure. In the method, the printing technology is adopted to print the corrodent or corrosion preventive to replace the photolithography technology in the prior art, thus lowering the production cost and greatly improving the production efficiency, and the method is suitable for scale production.

Description

technical field [0001] The invention relates to a manufacturing process of a solar cell, in particular to a manufacturing method of a silicon solar cell. Background technique [0002] Solar cells are mainly made on the basis of semiconductor materials. Its working principle is that photoelectric materials absorb light energy and then undergo photoelectron reactions to generate current. At present, silicon solar cells are widely used. [0003] The rear point contact solar cell is a silicon solar cell with high conversion efficiency of monocrystalline silicon. The positive and negative electrodes of the cell are located on the back of the cell. The electrode contact area is moved to the back surface, which avoids the influence of Auger recombination on the battery efficiency; the texture of the front surface and the reflection of the metal electrode on the back surface can form a good light trapping effect. [0004] In the prior art, in the preparation method of the back cont...

Claims

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to View More

Application Information

Patent Timeline
no application Login to View More
Patent Type & Authority Applications(China)
IPC IPC(8): H01L31/18
CPCY02P70/50
Inventor 肖青平
Owner BEIJING NAURA MICROELECTRONICS EQUIP CO LTD