Method for manufacturing silicon solar cells
A technology of silicon solar cells and manufacturing methods, applied in the direction of final product manufacturing, sustainable manufacturing/processing, circuits, etc., can solve the problems of reduced production efficiency, low production efficiency, and expensive investment in lithography equipment, and achieve low production costs, The effect of high production efficiency
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[0024] Specific examples, such as figure 1 shown, including the following steps:
[0025] Step 1. Cleaning:
[0026] Select a low-resistance N-type monocrystalline silicon wafer as the substrate 1, with a thickness of about 200-250um, and remove the damaged layer on the surface of the silicon wafer with KOH or NaOH solution;
[0027] Step 2, N-type doping:
[0028] Put the substrate 1 processed in step 1 in a high-temperature diffusion furnace, and pass through POCl 3 1. Doping the front and back sides of the substrate 1 to form N-type doped layers 2 and 5 on the front and back sides, and the sheet resistance is controlled between 10-60Ω / □.
[0029] Step 3. Growing SiO 2 Floor:
[0030] After doping, a layer of SiO is thermally oxidized on both sides of the substrate 1 2 Layer 6 has a thickness between 3nm and 10nm.
[0031] Step 4. Corrosion of SiO 2 :
[0032] SiO on the back side of substrate 1 2 On layer 6, etchant is printed by printing process, etched to form p...
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