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Large-size target ultrasonic treatment device and treatment method thereof

A large-size target and processing device technology, applied in auxiliary devices, metal material coating process, ion implantation plating and other directions, can solve the problem of inconsistent surface treatment effect of blanks, etc. The effect of improving production efficiency

Active Publication Date: 2012-05-09
KONFOONG MATERIALS INTERNATIONAL CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
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Problems solved by technology

[0005] The purpose of the present invention is to provide a large-size target ultrasonic treatment device to solve the problem of inconsistency in the treatment effect of the blank surface in the existing ultrasonic treatment process

Method used

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  • Large-size target ultrasonic treatment device and treatment method thereof
  • Large-size target ultrasonic treatment device and treatment method thereof
  • Large-size target ultrasonic treatment device and treatment method thereof

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Embodiment Construction

[0023] According to the background technology, the existing ultrasonic treatment process is to scan the surface of the target blank by moving the ultrasonic generator, and because the structure of the ultrasonic generator is relatively complicated, it is difficult to keep the distance between the blank and the blank during the moving process. The consistency of the ultrasonic treatment effect on the surface of the target blank is affected, and repeated surface ultrasonic treatment is required, which reduces the production efficiency. The present invention solves the above-mentioned problems by fixing the sonotrode and moving the target blank relative to the sonotrode. Since the structure of the target blank is generally a square or circular plate-like structure, it is easier to move the target blank while maintaining its distance from the sonotrode.

[0024] Based on the above ideas, figure 1 A schematic diagram of a large-size target ultrasonic treatment device provided by t...

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Abstract

The invention discloses a large-size target ultrasonic treatment device and a treatment method thereof. The device comprises an ultrasonic generator, a target blank bearing table and a driving device, wherein the ultrasonic generator is used for generating and transmitting ultrasound waves; the target blank bearing table is used for bearing target blanks and aligning with the ultrasonic generator; and the driving device is arranged on the target blank bearing table and used for moving the target blanks. The driving device can move the target blanks relative to the ultrasonic generator and keep the space between the target blanks and the ultrasonic generator consistent. The invention can stabilize the consistency of the ultrasonic treatment effect while ensuring the ultrasonic treatment quality without repeatedly treating the surfaces of the blanks, and improve the production efficiency.

Description

technical field [0001] The invention relates to the field of semiconductor manufacturing, in particular to a large-size target ultrasonic processing device and a processing method thereof. Background technique [0002] In the semiconductor industry, a target assembly is composed of a target that meets the sputtering performance and a back plate that is combined with the target and has a certain strength. The back plate can play a supporting role when the target assembly is assembled to the sputtering base, and has the effect of conducting heat. At present, metal tantalum (Ta), copper (Cu), aluminum (AL), etc. are mainly used as targets through physical vapor deposition (PVD) coating and barrier layer formation, and magnetron sputtering is used in the sputtering process; need to use Copper or aluminum materials with sufficient strength and high thermal conductivity and electrical conductivity are used as the backplane material. [0003] The surface size of the current large...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): C23C14/34B23K3/08
Inventor 姚力军潘杰王学泽欧阳琳刘庆
Owner KONFOONG MATERIALS INTERNATIONAL CO LTD
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