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Self-powered low power consumption integrated circuit chip and preparation method thereof

An integrated circuit, low power consumption technology, applied in the field of low power integrated circuit chip and its preparation, can solve the problems of integrated circuits that cannot drive high power consumption, low power, etc.

Inactive Publication Date: 2012-09-05
FUDAN UNIV
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

However, compared with ordinary external batteries, general semiconductor solar cells with limited area can generate less power under the condition of light, and cannot drive high-power integrated circuits.

Method used

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  • Self-powered low power consumption integrated circuit chip and preparation method thereof
  • Self-powered low power consumption integrated circuit chip and preparation method thereof
  • Self-powered low power consumption integrated circuit chip and preparation method thereof

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Embodiment Construction

[0039] The technical solution of the present invention will be described in detail below in conjunction with the accompanying drawings and specific examples. In the following description, the same reference numerals denote the same components, and repeated description thereof will be omitted.

[0040] In the following reference drawings, for convenience of description, the sizes of different layers and regions are enlarged or reduced, so the shown sizes do not necessarily represent actual sizes, nor do they reflect the proportional relationship of sizes. The referenced figures are schematic illustrations of idealized embodiments of the invention, and the illustrated embodiments of the invention should not be construed as limited to the particular shapes of regions illustrated in the figures but are to include resulting shapes, such as manufacturing-induced deviations. For example, the curves obtained by etching are usually curved or rounded, but in the embodiment of the presen...

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Abstract

The invention belongs to the technical field of integrated circuits, in particular to a self-powered low power consumption integrated circuit chip and a preparation method thereof. The integrated circuit chip comprises a semiconductor substrate, a low power consumption integrated circuit and a solar battery which are arranged on the substrate. The low power consumption integrated circuit comprises a tunneling field effect transistor. The low power consumption integrated circuit chip and the solar battery are simultaneously formed on the same semiconductor substrate. The technology for formingthe solar battery is compatible with the technology for forming the low power consumption integrated circuit. The low power consumption integrated circuit can be powered by the solar battery, thus forming the self-powered low power consumption integrated circuit.

Description

technical field [0001] The invention belongs to the technical field of integrated circuits, and in particular relates to a self-powered low-power integrated circuit chip and a preparation method thereof. Background technique [0002] An integrated circuit is a complete electronic circuit that uses semiconductor manufacturing technology to manufacture many transistors, resistors, capacitors and other components on a small silicon chip, and combines the components according to the method of multi-layer wiring or tunnel wiring. Integrated circuits are widely used in all aspects of life. Among them, metal-oxide-semiconductor field effect transistor (MOSFET) is one of the basic devices constituting integrated circuits. Its main advantages are high input impedance, low power consumption, strong anti-interference ability and suitable for large-scale integration. But as the size of metal-oxide-semiconductor field effect transistors gets smaller and smaller, the cost of optimizing ...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): H01L27/142H01L21/82
CPCY02E10/50
Inventor 吴东平张世理娄浩涣王鹏飞张卫
Owner FUDAN UNIV