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Preparation method of selective emitting electrode crystal silicon solar battery

A technology for solar cells and crystalline silicon, applied in circuits, electrical components, semiconductor devices, etc., can solve the problems of complex process, low production efficiency and high cost, and achieve the effect of good repeatability and low cost

Inactive Publication Date: 2011-06-22
上海太阳能电池研究与发展中心
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Problems solved by technology

The disadvantage of this method is that the cost is high, the laser is expensive, and the process is complicated, and the production efficiency is not high
It is also used to mix high-concentration phosphorus slurry into the electrode paste when printing electrodes, so that high doping can be obtained in the electrode contact area after sintering. However, due to the short sintering time of the electrode, phosphorus atoms cannot diffuse deep into the silicon wafer. Therefore, the effect is not ideal

Method used

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  • Preparation method of selective emitting electrode crystal silicon solar battery
  • Preparation method of selective emitting electrode crystal silicon solar battery
  • Preparation method of selective emitting electrode crystal silicon solar battery

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Embodiment Construction

[0025] The specific embodiment of the present invention is described in further detail below in conjunction with accompanying drawing:

[0026] The involved selective emitter crystalline silicon solar cell structure is as figure 1 Shown, where 1 is the silver grid line electrode, 2 is the aluminum back field, n in the figure + , n and p respectively form a horizontal n at the grid electrode + / n junction and a longitudinal n + / p junction, a p-n junction is formed outside the gate electrode.

[0027] The concrete steps of this embodiment are as follows:

[0028] 1. P-type crystalline silicon substrates (including monocrystalline silicon and polycrystalline silicon) are cleaned and textured, and placed in a diffusion furnace for conventional phosphorus atom diffusion. After diffusion, the surface sheet resistance of the silicon wafer is about 40Ω / □, A layer of phosphosilicate glass layer 3 containing phosphorus atoms grows on the surface of the silicon wafer, and the conce...

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Abstract

The invention discloses a preparation method of a selective emitting electrode crystal silicon solar battery. The method of the invention is characterized in that a method for naturally forming a phosphor-silicon glass layer on a P-N node when growing the P-N node on a silicon substrate is utilized, and the phosphor-silicon glass layer under an electrode region is maintained by adopting a screen printing method. Because the phosphor-silicon glass layer has higher phosphor atom content, re-diffusion is carried out on the phosphor-silicon glass layer under the electrode region so that the phosphor atoms in the phosphor-silicon glass layer are diffused into a silicon sheet body. Thereby, a transverse n<+> / n node and a vertical n<+> / p node are formed at a grid line electrode for forming a selective emitting electrode crystal silicon solar battery. The method has the advantages that the method is compatible to the crystal silicon solar battery industrialized production process, additional equipment does not need to be added, the cost is low, the repeatability is good, and the invention is suitable for industrial mass production.

Description

technical field [0001] The invention relates to a method for preparing a solar cell, in particular to a method for preparing a selective emitter crystalline silicon solar cell. Background technique [0002] Solar power generation is one of the clean energy that has developed very rapidly in recent years. In all current solar power generation, crystalline silicon (including monocrystalline silicon and polycrystalline silicon) solar cell products account for about 90% of the market share. Although thin-film cells, including amorphous silicon cells, offer the prospect of a low-cost product, they cannot yet completely replace crystalline silicon cells due to reasons such as low conversion efficiency. Therefore, it can be said that reducing the cost of solar cells is mainly to reduce the cost of crystalline silicon solar cells. To reduce the cost of crystalline silicon solar cells, we can mainly start from two aspects: 1. Use thinner crystalline silicon substrate materials. 2....

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): H01L31/18
CPCY02P70/50
Inventor 周呈悦王懿喆马小凤梅伟芳
Owner 上海太阳能电池研究与发展中心