TFT-LCD (Thin Film Transistor Liquid Crystal Display) array substrate and manufacture method thereof

Abstract

The invention relates to a TFT-LCD (Thin Film Transistor Liquid Crystal Display) array substrate and a manufacture method thereof. The array substrate comprises a grid line and a data line which are formed on the substrate, wherein a pixel electrode and a thin film transistor are formed in a pixel region limited by the grid line and the data line; a first insulating layer and a second insulating layer are formed between the grid line and the data line; and the pixel electrode is arranged between the first insulating layer and the second insulating layer. In the invention, through arranging the two insulating layers and arranging the pixel electrode between the two insulating layers, when the pixel electrode forms a memory capacitor with a common electrode line or the grid line, the distance between two electrode plates of the memory capacitor is only equal to the thickness of the first insulating layer, thus the distance between the two electrode plates of the memory capacitor is greatly reduced, and the memory capacitor of a unit area is greatly improved. Furthermore, because the structure of the two insulating layers is adopted, an interface formed between the insulating layers and a semiconductor layer can be improved so as to improve the characteristics of the TFT.

Description

technical field [0001] The invention relates to a thin film transistor liquid crystal display structure and a manufacturing method thereof, in particular to a TFT-LCD array substrate and a manufacturing method thereof. Background technique [0002] Thin Film Transistor Liquid Crystal Display (TFT-LCD for short) has the characteristics of small size, low power consumption, and no radiation, and occupies a dominant position in the current flat panel display market. [0003] TFT-LCD is mainly composed of an array substrate and a color filter substrate in a box, wherein thin-film transistors and pixel electrodes arranged in a matrix are formed on the array substrate, and each pixel electrode is controlled by a thin-film transistor. When the thin film transistor is turned on, the pixel electrode is charged during the turn-on time, and after the charging is completed, the voltage of the pixel electrode will be maintained until recharging in the next scan. Generally speaking, the ...

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Problems solved by technology

But no matter what type, the prior art uses a gate metal film as one electrode plate of the storage capacitor, and a gate insulating layer and a passivation layer are interposed between the pixel electrode as the other electrode plate of the storage capacitor. Thickness is The thickness of the passivation layer is It can be seen from the calculation formula of the storage capacitor that the size of the storage capacitor per unit area is inversely proportional to the distance between the two electrode plates. Since the distance between the two electrode plates of the storage capacitor in the existing TFT-LCD array substrate is relatively large, the unit area The storage capacitor is relatively small

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