Heatless AWG preparation method based on curved array waveguide grating
A technology for arrayed waveguide gratings and manufacturing methods, which is applied in the coupling of optical waveguides, etc., can solve the problems of reduced isolation bands, large temperature drift, and failure to meet the application requirements of outdoor WDM-PON systems, and achieve improved performance stability and convenient operation , to overcome the effect of optical performance changes
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[0060] The athermal AWG manufacturing method based on the curved arrayed waveguide grating of the present invention will be described in detail below with reference to the embodiments and the accompanying drawings.
[0061] The athermal AWG manufacturing method based on the curved arrayed waveguide grating of the present invention comprises the following manufacturing steps:
[0062] 1) At least one input waveguide 1, input slab waveguide 2, array waveguide 3, output slab waveguide 4 and N output waveguides 5 are used to form a curved AWG chip 6 deposited on a silicon substrate;
[0063] 2) adopt an interlayer 7, the structure of the interlayer 7 is as image 3 As shown, it can be various graphics such as squares and polygons. Because the appearance of the curved AWG chip 6 is easily deformed after being slightly stressed, the performance parameters of the curved AWG chip 6 change, and the deformation of the arrayed waveguide 3 has a greater impact on the performance paramete...
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