Method and nanoimprint equipment for manufacturing moire grating

Abstract

The invention discloses a method and nanoimprint equipment for manufacturing a moire grating, which belong to the technical field of optical device manufacturing and optical measurement mechanics. The method comprises the following steps of: manufacturing a nickel grating film by adopting an electroforming process first and then manufacturing a nickel-based metal grating template by adopting a coating process. The shortcomings of easy cracking of brittle templates based on silicon and the like are avoided; and the template can be used repeatedly. A nanoimprint method and the nanoimprint equipment for manufacturing the moire grating on the surface of a test piece have the characteristics of simple operation, economy and practicability. The nanoimprint equipment comprises a pressurizing system, a heating system, a cooling system, a control system and the like. Impression is finished in a vacuum environment; a guide rail is used for positioning; an air bag is used for propelled controllably; self-balancing of an air pressure in the air bag is utilized for keeping an upper pressure board and a lower pressure board parallel in an imprinting process; a temperature is raised fast by adopting electrical heating; the temperature is reduced fast by adopting a water cooling device; and therefore, the manufacturing efficiency of the moire grating is improved. The method and the equipment can manufacture moire gratings, suitable to be tested by the methods such as geometric moire, moire interferometry and the like, of various frequencies.

Description

technical field [0001] The invention relates to a method for making moiré gratings and nano-imprinting equipment, belonging to the fields of optical device manufacturing and photomechanics. Background technique [0002] The grating transferred or directly etched on the surface of the measured object is used as the carrier of the deformation information on the surface of the object. In the field of photomechanics, it is the basic element for the measurement of the surface deformation of the object in the geometric moire method, moiré interferometry and electron microscope moire method. . [0003] Mechanical scribing is the most traditional method for making gratings. This method uses a scribing machine to carve grooves one by one on the surface of the grating material, which puts forward high requirements on the mechanical precision of the scribing machine. The equipment of the engraving machine is heavy, and the production of the grating is not only time-consuming and expen...

AI Technical Summary

Problems solved by technology

The disadvantage of holographic photolithography is that it requires more optical components and complex optical paths, so for non-professionals, it is not only difficult to implement, but also the efficiency is still very low

However, brittle silicon templates are commonly used in nanoimprinting, which are easy to be damaged or even broken during the imprinting process, resulting in serious economic losses. Electroforming and coating processes provide new ideas for flexible metal grating templates ( Liu Renzhi, Practical Electroforming Technology, Beijing: Chemical Industry Press, 2006. Cao Hua, Yuan Song, Lamination Technology and Practice, Beijing: Printing Industry Press, 2000); the existing nanoimprinting equipment is bulky and expensive , The centering and leveling procedure is complicated, which greatly limits the popularization and application of this technology

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