Non-linear taper inverted cone coupler structure

Abstract

The invention provides a non-linear taper inverted cone coupler structure which comprises a silicon substrate, a buried oxide layer and a top layer silicon. The buried oxide layer is prepared on the substrate, the material of the buried oxide layer is silicon dioxide, the top layer silicon is prepared on the buried oxide layer and can effectively prevent light from leaking in the substrate, one end of the top layer silicon is a bar-shaped waveguide and the other end is an inverted cone coupler, the inverted cone coupler is in a gradient exponential type or quadratic type structure, the operating wavelength of the inverted cone coupler is 1500nm to 1600nm, and the fluctuation of insertion loss is less than 0.3dB.

Description

technical field [0001] The invention relates to the field of integrated optics, and provides an inverted cone coupler structure for efficiently coupling a tapered optical fiber and a submicron waveguide device, in particular a non-linear tapered inverted cone coupler structure. Background technique [0002] In the field of optics, we often encounter the problem of optical coupling of optical waveguides with different cross-sectional sizes. When the light of the waveguide is coupled into a large-sized optical waveguide, a large optical loss will be caused. [0003] There is also the coupling problem between optical waveguides of different structures. The general shape of the ridge-type optical waveguide is like a "convex" shape, and the raised middle area is the main light-guiding area, which is called the inner ridge area or ridge-type area, and the two sides of the ridge-type area are open and extended, and the light transmitted between them Rarely, it is called a flat zo...

AI Technical Summary

Problems solved by technology

However, in order to achieve the best coupling efficiency for this structure, the cross-section of the inverted cone tip is very small, only 80nm (width) × 200nm (height), which requires a high manufacturing process.

Moreover, the gradient length of the inverted cone is also 300um, which is not conducive to the reduction of device size we now require.

[0007] The gradient structure of the inverted cone is currently reported only to the above-mentioned linear change type. For the inverted cone gradient structure whose linear shape is exponential and quadratic, there are no related reports in the world.

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