Method for producing trichlorosilane
A technology of trichlorosilane and a production method, which is applied in directions such as halogenated silanes, halogenated silicon compounds, etc., can solve the problems of high cost, low yield of trichlorosilane, complicated equipment and the like
- Summary
- Abstract
- Description
- Claims
- Application Information
AI Technical Summary
Problems solved by technology
Method used
Image
Examples
Embodiment 1
[0032] A production method of trichlorosilane, which produces trichlorosilane by reacting hydrogen chloride and silicon powder in a fluidized furnace, before hydrogen chloride gas enters the fluidized furnace, it enters a mixer, and silicon tetrachloride is added into the mixer, two kinds of gases The volume ratio of hydrogen chloride: silicon tetrachloride gas = 8: 1, the two kinds of gas are fully mixed at 60 ~ 80 ° C, the silicon tetrachloride gas and the water in the mixed gas react to form silicon dioxide, after removing the silicon dioxide The gas enters the boiling furnace and reacts with silicon powder to form trichlorosilane.
[0033] In the above-mentioned production method of trichlorosilane, the moisture in the gas coming out from the mixer is 35ppm, and in the resulting system after the reaction is completed, SiHCl 3 The content is 85.4%, SiCl 4 The content is 10.2%.
Embodiment 2
[0035] A production method of trichlorosilane, which produces trichlorosilane by reacting hydrogen chloride and silicon powder in a fluidized furnace, before hydrogen chloride gas enters the fluidized furnace, it enters a mixer, and silicon tetrachloride is added into the mixer, two kinds of gases The volume ratio of hydrogen chloride: silicon tetrachloride gas = 9: 1, the two gases are fully mixed at 60 ~ 80 ° C, the silicon tetrachloride gas and the water in the mixed gas react to form silicon dioxide, after removing the silicon dioxide The gas enters the boiling furnace and reacts with silicon powder to form trichlorosilane.
[0036] In the above-mentioned production method of trichlorosilane, the moisture in the gas coming out from the mixer is 40ppm, and in the resulting system after the reaction is completed, SiHCl 3 The content is 87.6%, SiCl 4 The content is 9.6%.
Embodiment 3
[0038] A kind of production method of trichlorosilane, produces trichlorosilane by reacting hydrogen chloride and silicon powder in fluidized furnace, before hydrogen chloride gas enters into fluidized furnace, first enters mixer, adds silicon tetrachloride and hydrogen into mixer, makes The volume ratio of the three gases is hydrogen chloride: silicon tetrachloride gas: hydrogen = 8:1:0.5, the three gases are fully mixed at 60-80 °C, and the silicon tetrachloride gas reacts with the water in the mixed gas to form carbon dioxide Silicon, after removing silicon dioxide, the gas enters the fluidized furnace and reacts with silicon powder to form trichlorosilane.
[0039] In the above-mentioned production method of trichlorosilane, the moisture in the gas coming out from the mixer is 38ppm, and in the resulting system after the reaction is completed, SiHCl 3 The content is 92.5%, SiCl 4 The content is 5.2%.
PUM
Login to View More Abstract
Description
Claims
Application Information
Login to View More 

