Harmonic micrometer/nanometre film thermal property test method

Abstract

The invention discloses a harmonic micrometer / nanometre film thermal property test method. The method is characterized in that a minitype metal detector directly deposited on film / substrate sample structures to be tested is utilized for detecting thermal parameters of each layer of the film structure. The film / substrate sample structures are arranged in parallel at the inner cavity bottom of a constant temperature vacuum cavity during test. One end of a thermocouple of a temperature regulation system is inserted in the inner cavity, and the other end is electrically connected with a temperature controller. A TEC heating / cooling device is tightly attached to the inner cavity and arranged in a thermal insulating layer, and is controlled to start or stop by the temperature controller. A vacuum-pumping system is externally connected with the inner cavity. A harmonic measurement unit is electrically connected with the minitype metal detector, and harmonic is utilized for measuring fundamental wave voltage real parts and third harmonic voltage real parts at both ends of a metal band in the middle section of the minitype metal detector in the relevant frequency range. The heat conductivity coefficients and the thermal diffusivity parameters of the substrate surface single / multiple layer micrometer / nanometre film structures are fitted according to the harmonic test principle.

Description

technical field [0001] The invention relates to the field of testing technology, and relates to a method for measuring thermal physical parameters (such as thermal conductivity and thermal diffusivity, etc.) of micro / nano films by means of alternating current heating and harmonic methods, especially for single / multi-layer applications on the surface of substrates A method for testing thermal and physical parameters of micro / nano film structures. Background technique [0002] In the application field of micro / nano technology, the measurement of thermal parameters of micro / nanoscale thin films is an important challenge. So far, various testing methods have been developed due to the demand for data on thermophysical properties of micro / nanomaterials. At present, there are two main types of measurement methods suitable for micro-nano-scale thin films: periodic AC calorimetry and flash method based on laser heating. Although the periodic AC calorimetry can measure films with a ...

AI Technical Summary

Problems solved by technology

[0003] The purpose of the present invention is to solve the technical defects that the existing thin film thermophysical property measurement method cannot simultaneously and accurately measure multiple thermophysical property parameters of nanometer thick films and cannot measure the structure of multilayer micro / nano thin films

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