Infrared spectral mems gas sensor based on filter structure spectroscopy

Abstract

The invention discloses an infrared spectrum type MEMES gas sensitive sensor based on filter structure light splitting which analyzes the infrared absorption spectrum of a gas to determine the component and concentration of the gas. The gas sensitive sensor comprises an infrared light supply (1), an analysis air chamber (2), a photonic crystal filter (3) and an infrared light intensity detection array (4) which are integrated on a silicon substrate. The sensor utilizes the infrared transmittance information of gas to detect gas, the positions of characteristic peaks to judge the category of gas and the absorbances of the specific wavelengths to determine the content of gas, thus effectively solving the problems that the existing gas sensitive sensor has low sensitivity, the categories of the detected gas are limited and the anti-interference ability of the gas sensitive sensor is low. In addition, the preparation method of the sensor of the invention and the CMOS technology are compatible, thus the sensor is easy to integrate, the cost is reduced and the promotion and application of the sensor are facilitated.

Description

technical field [0001] The invention relates to a gas sensor, in particular to an infrared spectrum MEMS gas sensor based on filtering structure light separation. Background technique [0002] Gas sensors are indispensable tools in many fields such as pharmaceuticals, chemicals, food, customs, coal mines, medical testing, and environmental monitoring. However, traditional gas sensors are large in size, high in power consumption, low in sensitivity, and poor in performance consistency. Inconvenient and difficult to popularize; MEMS-based gas sensor has small size, low power consumption, good performance consistency and easy to use. However, most MEMS gas sensors based on sensitive membranes use the selective adsorption between the sensitive membrane and the target gas to cause changes in electrical parameters such as resistance and capacitance of the sensitive membrane or mechanical parameters such as vibration frequency to achieve gas detection. The types of gases that this...

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Problems solved by technology

[0005] In order to solve the problems of low sensitivity, weak anti-interference ability, difficult processing, and difficulty in miniaturization of existing gas sensors, the present invention provides an infrared spectrum MEMS gas sensor based on filtering structure to meet people's requirements for high-precision gas sensors. analysis requirements

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