Vapor generator and vapor deposition apparatus

A technology for generating devices and steam, which is applied in lighting devices, vacuum evaporation coatings, devices for coating liquids on surfaces, etc., can solve problems such as deterioration of organic film quality and deterioration of organic evaporation materials, and achieve good film quality Effect

Active Publication Date: 2011-01-12
ULVAC INC
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

As a result, compared with the initial state, the organic vapor deposition mater

Method used

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  • Vapor generator and vapor deposition apparatus
  • Vapor generator and vapor deposition apparatus
  • Vapor generator and vapor deposition apparatus

Examples

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Embodiment Construction

[0032] figure 1 Symbol 1 in represents an example of the manufacturing apparatus of the present invention for manufacturing an organic electroluminescence element. The manufacturing apparatus 1 has a transfer chamber 2 , one or more vapor deposition apparatuses 10 a to 10 c , a sputtering chamber 7 , loading and unloading chambers 3 a and 3 b , and processing chambers 6 and 8 . The respective vapor deposition devices 10a to 10c, the sputtering chamber 7, the loading and unloading chambers 3a and 3b, and the processing chambers 6 and 8 are connected to the transfer chamber 2, respectively.

[0033] A vacuum exhaust system 9 is connected to the transfer chamber 2 , the vapor deposition devices 10 a to 10 c , the sputtering chamber 7 , the loading and unloading chambers 3 a and 3 b , and the processing chambers 6 and 8 . The vacuum exhaust system 9 creates a vacuum atmosphere inside the transfer chamber 2, the vapor deposition apparatuses 10a to 10c, the processing chambers 6 a...

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Abstract

An organic thin film having excellent film qualities is formed. A vapor generating apparatus (20) is provided with an evaporation chamber (21), a jetting head (35) and a tank (31). A deposition material (39) is in the liquid state, stored in the tank (31) and supplied to the jetting head (35) from the tank (31). The jetting head (35) jets the deposition material (39), which has been supplied inside, from a jetting port (38), and places the deposition material on a heating member (25) inside the evaporation chamber (21). The jetting head (35) correctly supplies the deposition material (39) of a required quantity. Since only the required quantity of the deposition material (39) is heated, the organic thin film which does not deteriorate and has excellent film qualities is formed.

Description

technical field [0001] The present invention relates to a vapor generator and a vapor deposition device using the vapor generator. Background technique [0002] Organic electroluminescent (EL) elements are one of the most attention-grabbing display components in recent years, with excellent characteristics of high brightness and fast response. The organic electroluminescent element has a light emitting region that emits three different colors of red, green, and blue on a glass substrate. The light-emitting region is the anode electrode film, hole injection layer, hole transport layer, light-emitting layer, electron transport layer, electron injection layer and cathode electrode film stacked in this order, and red, Green or blue color. [0003] The hole transport layer, the light emitting layer, the electron transport layer, etc. are generally composed of organic materials, and a vapor deposition apparatus is widely used to form a film of such an organic material. [0004]...

Claims

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Application Information

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IPC IPC(8): H05B33/10C23C14/24H01L51/50
CPCC23C14/12B05D1/60H01L51/001C23C14/243H10K71/164
Inventor 根岸敏夫
Owner ULVAC INC
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