Integrated bias coil type giant magneto-impedance effect (GMI) magneto-dependent sensor

Abstract

The invention discloses an integrated bias coil type giant magneto-impedance effect (GMI) magneto-dependent sensor, which belongs to the technical field of micro-electro-mechanical systems, and comprises a surface-oxidized Si substrate, a tortuous multi-turn sensor, a solenoid bias coil and insulating materials, wherein the tortuous multi-turn sensor is arranged at an internal shaft center of the solenoid bias coil, the insulating materials are packaged outside the solenoid bias coil, and the coil is arranged on the bottom surface of the Si substrate. In the invention, the tortuous NiFe / Cu / NiFe sandwich film GMI sensor and the solenoid bias coil are processed by using the MEMS micro-electro-mechanical system technology, and the GMI sensor is arranged at the shaft center of the solenoid bias coil, thus the offset of an operating point of the GMI sensor can be realized by using magnetic fields generated when direct currents pass through the coil so as to realize the reasonable magnetic-field operating interval range of the sensor.

Description

technical field [0001] The invention relates to a device in the technical field of micro-electro-mechanical systems, in particular to an integrated bias coil type giant magneto-impedance effect magnetic sensor. Background technique [0002] In the field of magnetic field measurement, electronic navigation, and automotive electronic sensor fields such as automobile wheel speed sensors, and position sensors such as magnetic encoders, as well as current sensors, and the detection of magnetic nanoparticles in the biomedical field, it needs to be widely used. Magnetic sensors, by converting magnetic field signals into electrical signals, realize the detection of magnetic field strength, direction, speed, position, current, and biomolecular information. Various magnetosensitive sensors currently used include Hall effect Hall effect sensors, fluxgate sensors, giant magnetoresistance GMR sensors, anisotropic magnetoresistance sensors AMR, etc. Hall sensors are made of semiconductor ...

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Problems solved by technology

[0005] Find through literature search: Y.Honkura has published " development of amorphous wire type MIsensors for automobile use " (amorphous The development of wire-type magneto-impedance sensors used in automobiles) uses the method of winding the bias coil on the giant magneto-resistance sensor of the wire to realize the movement of its working point, but the coil is wound by traditional hand or machine. Large size, difficult to control precisely

[0006] Y.Nishibe et al. Y.Nishibe, N.Ohta, K.Tsukada, H.Yamadera, Y.Nonomura, K.Mohriand T.Uchiyama in "IEEE Transactions on Vehicular Technology" (IEEE Vehicle Technology Transactions, 2004, Issue 53 : 1827-1834) published "Sensing of passing vehicles using a lane marker on a road with built-in thin-film MI sensor and power source" (using the method of placing embedded thin-film magneto-impedance sensors and power road signs on the road to sense Passing vehicles) The sensor with a meandering sandwich structure CoZrNb / Cu / CoZrNb uses a thin-sheet FeCoCr hard magnet under the sensor to realize the magnetic field bias of the sensor, thereby realizing the movement of the working point, but the hard magnetic material is difficult to process, and it is difficult to achieve its bias. Precise control of the orientation of the magnetic field

[0007] P.Delooze et al. P.Delooze, L.V.Panina, D.J.Mapps, K.Ueno and H.Sano published "Sub- The sandwich structure CoFeB / Cu / CoFeB sensor in NanoTesla Resolution differential magnetic field sensor utilizing asymmetrical magnetoimpedance inmultilayer films" (asymmetrical magnetoimpedance sub-Na Tesla resolution differential magnetic field sensor using multilayer film), through the DC bias current The method of superimposing the AC excitation current, and at the same time adopting the crossed anisotropy in the upper and lower magnetic layers, so as to realize the movement of the working point, although it does not require coils or bias hard magnetism, but it requires the upper and lower two layers of crossed Anisotropy makes it difficult to precisely control the thin film production process, which increases the complexity of the production process

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