10 results about "Magneto impedance" patented technology

The disclosed embodiments provide a method for estimating magnetotelluric impedance, which belongs to the field of surveying and specifically includes: Step 1: Performing a Fourier transform on electromagnetic time series data of multiple electromagnetic field components to obtain a spectrum array corresponding to each electromagnetic field component; Step 2: Identifying the interference frequency of each electromagnetic field component based on the spectrum array; Step 3: Combining the interference frequency and deviation value; Step 4: Attenuating the spectrum array using the combined interference frequency and deviation value; Step 5: Restoring the electromagnetic time series data using the attenuated spectrum array to obtain a transformation result; Step 6: Estimating magnetotelluric impedance based on the transformation result. The disclosed solution improves the adaptability and accuracy of magnetotelluric impedance estimation.

The present invention relates to a magnetic sensor. The object of the present invention is to improve the sensitivity of a magnetic sensor using a sensing element that senses a magnetic field by a magnetoimpedance effect. The solution of the present invention is that a magnetic sensor (200) is provided with: a sensing element (10) that senses a magnetic field by a magnetoimpedance effect; and a concentrating member (20) that is provided opposite to the sensing element (10), the concentrating member (20) being composed of a soft magnetic body and concentrating magnetic lines of force from the outside to the sensing element (10).

The invention provides a plasma current monitoring device for a semiconductor plasma etching cavity, and relates to the field of monitoring of a semiconductor plasma etching process. The plasma flow in the cavity can be measured in real time under the condition that the environment of the cavity is not interfered. The device is composed of a main body substrate, an upper surface sensing layer, a lower surface integration layer and an electromagnetic shielding film covering the surface of the substrate. The upper surface sensing layer comprises a non-contact magneto-impedance effect current sensor network which is arranged in an annular array; the lower surface integration layer comprises a master control acquisition microcontroller circuit, a power supply circuit, a thin film battery, a charging circuit, a real-time communication circuit and a storage module. The device adopts a structure, a size and an impedance design similar to those of an actual process wafer, can simulate a real state of the wafer in a plasma etching process, and acquires a magnetic signal of the substrate in real time in an etching process. The collected magnetic signals are processed and stored under the control of the microcontroller, and are transmitted to an external reading device through the real-time communication circuit. The method has wide applicability, can be compatible with various semiconductor process equipment, and provides a reliable technical means for real-time monitoring and optimization of the plasma etching process.

The invention discloses a lithium ion battery fault on-line detection device for non-contact magneto-impedance measurement. The device is composed of an operation host, a lock-in amplifier, a magnetic shielding barrel, a magnetic sensor probe group, a battery charging and discharging device, a lithium ion battery, a multi-degree-of-freedom non-magnetic micropositioner and a weak magnetic vibration isolation platform. Lithium electroplating of the lithium ion battery can generate metal lithium which is greatly different from electrode conductivity, and an internal conductivity algorithm based on magnetic field visualization can detect abnormal conductivity so as to detect occurrence of lithium electroplating; small current with specific frequency is superposed on charge and discharge current of the lithium ion battery, the magnetic sensor probe group scans magnetic field distribution on the surface of the battery to provide original data for a conductivity distribution calculation algorithm, and an upper computer sends a signal for changing a charging strategy to charging equipment according to a result to achieve the purpose of relieving lithium electroplating.

The magnetic sensor includes a non-magnetic substrate and a sensing element 31. The sensing element 31 has a long-side direction and a short-side direction, has uniaxial magnetic anisotropy in a direction intersecting the long-side direction, and senses a magnetic field through the magneto-impedance effect. The sensing element 31 includes a plurality of soft magnetic layers 105a to 105d, and a plurality of non-magnetic layers 106a to 106c formed of a non-magnetic material and laminated between the plurality of soft magnetic layers 105a to 105d. The soft magnetic layers 105a to 105d facing each other with the respective non-magnetic layers 106a to 106c interposed therebetween are antiferromagnetically coupled.

The invention relates to the technical field of magnetic sensors, in particular to a biosensor based on the off-diagonal GMI effect and a magnetic bead detection method.The sensor device comprises an off-diagonal giant magneto-impedance sensor, a PI film, an Au film, a crossed detection channel, a magnetic bead A, a magnetic bead B and a signal acquisition system; the non-diagonal giant magneto-impedance sensor is composed of a crossed magnetic core and an induction coil. A PI film is used as a substrate for sputtering Au, an Au film is a sputtered Cr / Au film, and a crossed detection channel is placed on the surface of the Au film and is used as a channel for magnetic bead detection. And the magnetic beads A and B are different superparamagnetic bead nanoparticles. The magnetic bead particles with superparamagnetism can generate a stray field under an external magnetic field, and when the magnetic bead particles are located on the surface of the magnetic sensor, the weak stray field generated by the magnetic beads can be detected by the magnetic sensor. By adopting an in-situ detection mode, high-sensitivity detection of two different magnetic beads can be realized at the same time.

The invention provides a high-sensitivity micro-magnetic field giant magneto-impedance sensor material as well as a preparation method and application thereof. The molecular formula of the high-sensitivity micro-magnetic field giant magneto-impedance sensor material is FeaSibBcCudNbeMf, M is a combination of more than two of metal elements Mn, V, Cr and Mo, a, b, c, d, e and f are atomic percentages of corresponding elements, a + b + c + d + e + f = 100, 73 < = a < = 74.5, 12.2 < = b < = 13, 7.2 < = c < = 9.5, 0.5 < = d < = 1, 2.1 < = e < = 2.8, and 0.6 < = f < = 2.5. The invention also provides a preparation method of the material. The GMI sensor material disclosed by the invention has excellent comprehensive soft magnetic performance, and can improve the sensitivity of a sensor and realize the detection of a micro magnetic field when being applied to the GMI sensor.

The application relates to a differential non-diagonal giant magnetoimpedance current sensor, a test system and a current measurement method, which comprises two non-diagonal giant magnetoimpedance current sensors with the same structure and based on the same working principle, the independent annular soft magnetic strips on the sensors and the solenoid coil are used to avoid the influence of the soft magnetic material itself on the measurement process; a compensation wire through which a current with the same size and opposite direction to the current in the wire to be measured is arranged to filter the disturbance of the geomagnetic field on the current measurement; meanwhile, a signal processing unit is arranged to carry out denoising and differential amplification processing on the induced voltage signals from the two non-diagonal giant magnetoimpedance current sensors, eliminate the disturbance of the geomagnetic field, suppress the common-mode noise of the magnetic sensor, and significantly improve the current detection precision and anti-interference ability of the sensor. The application focuses on the common problem of geomagnetic field interference in current measurement, effectively eliminates the interference signals while keeping the characteristics of simple sensor structure and high sensitivity.

The present invention relates to a device and method for detecting a weak magnetic field on a surface of an object based on the giant magnetoimpedance effect. A method for measuring a magnetic field includes positioning a giant magnetoimpedance probe at a first position near a surface of an object to be measured; applying an alternating current to the giant magnetoimpedance probe and measuring a first alternating voltage of the giant magnetoimpedance probe; calculating an impedance based on the alternating current and the first alternating voltage and determining a first magnetic field based on the impedance; positioning the giant magnetoimpedance probe at a second position above the first position; applying the alternating current to the giant magnetoimpedance probe and measuring a second alternating voltage of the giant magnetoimpedance probe; calculating an impedance based on the alternating current and the second alternating voltage and determining a second magnetic field based on the impedance; and calculating a measured magnetic field at the first position based on the first magnetic field and the second magnetic field.

A giant magneto-impedance device and a giant magneto-impedance device detection circuit, comprising a magnetic core, a first helical coil and a second helical coil. The first helical coil is wound around the magnetic core, and the second helical coil is wound outside the first helical coil, and the winding direction is opposite to that of the first helical coil. The giant magneto-impedance device GMI sensor of the present invention uses low-cost soft magnetic materials and enameled copper wires. Compared with GMI sensors that require complex processing techniques for preparation, this magnetic core winding coil process is relatively mature, has a simple structure, low cost, and is easy to mass-produce.