Array full-ring photon sieve light evener and manufacturing method thereof

Abstract

The invention discloses an array full-ring photon sieve light evener and a manufacturing method thereof. The array full-ring photon sieve light evener is a full-ring photon sieve array manufactured on a transparent medium, full-ring photon sieves are used as basic units and are a plurality of circular holes manufactured on a transparent substrate based on a Fresnel wave band sheet by the following steps of: firstly manufacturing photon sieves with the diffraction apertures one time of the corresponding Fresnel ring on the transparent medium, then still etching circular holes on the other Fresnel ring bands to form transparent etching circular holes on the odd and even ring bands of the wave band sheet, which are respectively the light-transmitting holes of the odd rings and the etching-phase light-transmitting holes of the even rings, wherein the phase of the etching-phase light-transmitting holes is pi, the size of each etching circular hole is the same as the width of the corresponding ring bands, and then forming the full-ring photon sieve by using the etching circular holes and the original diffraction holes. The invention realizes converting gauss light beams and other wavefront uneven laser beams into wavefront diffraction light beams approaching to a plane.

Description

Technical field [0001] The present invention relates to the technical field of wavefront shaping of laser beams, in particular to a wavefront flattening of Gaussian wavefront and irregular wavefront laser beams in a far-field diffracted light field, that is, a light field close to a plane wavefront distribution Array full-ring photon sieve homogenizer and manufacturing method thereof. This kind of array full-ring photon sieve homogenizer can be used in beam shaping, microelectronic maskless etching and other various optical paths that require planar wavefronts. Background technique [0002] It is a practical subject to homogenize Gaussian wavefront and irregular wavefront laser beams through various ways, so that the beam is transformed into a beam close to the plane wavefront. It has a wide range of applications in various optical paths, such as beam shaping , Microelectronics maskless etching and other various instruments that require plane wavefronts, optical devices that can...

AI Technical Summary

Problems solved by technology

The kaleidoscope method is easy to manufacture and adjust, the cost is greatly reduced, and the size of the output spot can be easily changed, but the transmission loss of this system is relatively large

[0008] Cylindrical mirror method: The principle of the method is to form a hollow square structure surrounded by four cylindrical mirrors. Each cylindrical mirror is installed on a fine adjustment frame. The size and shape of the hollow part can be controlled through adjustment. The laser is irradiated on the device Above, the hollow part of the laser passes through directly, and the light irradiated on the edge cylindrical lens will compensate for the weak light intensity part of the middle light. By calculating the parameters of the cylindrical lens and adjusting the adjustment knob properly, the uniform light effect can be obtained. The advantage of this method is that the beam transmittance is higher and the uniform light effect is better, but the designer has higher requirements, and the designer needs to calculate the lens parameters and design a high-precision fine-tuning mechanism

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