The invention discloses a multistage
coating oxygen-mediated annealing preparation method based on RAFM steel /
titanium nitride, and belongs to the technical field of
coating preparation. The method comprises the steps that a
TiN coating is deposited on the surface of a low-activation ferrite / martensitic steel matrix through magnetron
sputtering, a pure
titanium target material is used, the
nitrogen-
argon flow ratio is 1: 13-1: 18, the background vacuum degree is 4-6 * 10 <-5 > Pa, the deposition time is 60-90 min, and extra active heating is not applied to the matrix in the
deposition process; placing the deposition coating sample in a
quartz tube for packaging, wherein the
gas pressure in the tube provides a trace
oxygen atmosphere; and then annealing treatment is conducted at the temperature of 800-1000 DEG C, and heat preservation is conducted for 90-120 Through
oxygen-mediated element
diffusion and reaction, a multi-stage
composite structure sequentially comprising an inner
oxide layer, an Fe inner enrichment layer, a
TiN layer, an Fe outer enrichment layer and an outer
oxide layer from a matrix to the outside is formed in the
TiN coating in situ. The method is simple in process, a
transition layer does not need to be additionally deposited, and the prepared multi-stage coating is well combined with a matrix interface, has excellent
thermal shock resistance and can bear more than 30 times of
thermal shock cycles.