The invention relates to a preparation method of a substrate integrated, self-assembled and self-aligned micro lens group, and belongs to the technical field of micro-nano
processing of optical chips. According to the method, after a front epitaxial structure is completed and
thinning and
polishing are carried out, secondary
epitaxy is carried out on the back surface of a
wafer, a seed layer is manufactured, an infiltration layer and a lens layer are sequentially grown through an S-K growth method, and finally N infiltration
layers and N lens
layers are alternately grown on the back surface of the
wafer, so that the epitaxial structure is formed;
etching the formed epitaxial structure from top to bottom until the
etching depth covers all the infiltration
layers, and forming an
etching window; only the lens layer is left in the etching window formed by
corrosion and the infiltration layer around the etching window, and transparent materials are filled between the lens layer and the etching window for reinforcement. Based on S-K growth, the actual preparation of the micro lens group is completed in one step in the epitaxial growth stage, adverse factors such as errors and
pollution accumulated in multiple links in the production circulation process are omitted, and the precision and the yield are fully guaranteed.