Array photon sieve light evener and manufacturing method thereof

Abstract

The invention discloses an array photon sieve light evener which is an array of photon sieves, wherein the array is manufactured on a transparent medium according to the actual needs, and the size of the array is given out according to the actual needs. The photon sieves are a large number of diffractive optical elements with light-transmitting micropores different in radius, wherein the diffractive optical elements are manufactured on a Fresnel wave band ring, and the photon sieves are basic units of the array photon sieve light evener; and other parts are light-proof. The array is in the structure with repeated photon sieves. The invention simultaneously discloses a method for manufacturing the array photon sieve light evener. The array photon sieve light evener realizes wavefront flattening for gauss light beams and other uneven non-planar wavefront light beams, the light evening of the light beams, and wavefront light beams approaching to the plane. The light beams are widely applied to light path systems.

Description

technical field [0001] The invention relates to the technical field of wavefront shaping of laser beams, in particular to a wavefront flattening of a Gaussian wavefront and an irregular wavefront laser beam in the far-field diffraction light field, that is, to realize a light field close to a plane wavefront distribution An array photon sieve homogenizer and a manufacturing method thereof. The array photon sieve homogenizer can be used in beam shaping, microelectronics maskless etching and other various optical paths that require a plane wave front. Background technique [0002] It is a practical subject to homogenize the laser beam with Gaussian wavefront and irregular wavefront through various ways, so that the beam can be transformed into a beam close to the plane wavefront, and it has a wide range of applications in various optical paths, such as in beam shaping , Microelectronics maskless lithography and other various instruments that require a planar wavefront. Optic...

AI Technical Summary

Problems solved by technology

The kaleidoscope method is easy to manufacture and adjust, the cost is greatly reduced, and the size of the output spot can be easily changed, but the transmission loss of this system is relatively large

[0008] Cylindrical mirror method: The principle of the method is to form a hollow square structure surrounded by four cylindrical mirrors. Each cylindrical mirror is installed on a fine adjustment frame. The size and shape of the hollow part can be controlled through adjustment. The laser is irradiated on the device Above, the hollow part of the laser passes through directly, and the light irradiated on the edge cylindrical lens will compensate for the weak light intensity part of the middle light. By calculating the parameters of the cylindrical lens and adjusting the adjustment knob properly, the uniform light effect can be obtained. The advantage of this method is that the beam transmittance is higher and the uniform light effect is better, but the designer has higher requirements, and the designer needs to calculate the lens parameters and design a high-precision fine-tuning mechanism

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