Array type light evening device with annulus photon screen and manufacturing method thereof

Abstract

The invention discloses an array type light evening device with an annulus photon screen and a manufacturing method thereof. The array type light evening device with the annulus photon screen is an annulus photon screen array which is manufactured on a transparent medium, and the annulus photon screen is used as a basic unit of the array. The annulus photon screen is formed by a plurality of homocentric diffractive hole annuluses and a plurality of homocentric etching ring annuluses, which are alternately nested, and the diffractive hole annulus is the closest to the center of the annulus photon screen; the width of the diffractive hole annulus and the width of the etching ring annulus are gradually decreased respectively from the center of the annulus photon screen to outside, the width of the diffractive hole annulus is equal to the width of the etching ring annulus which is adjacent to the diffractive hole annulus far from the central direction of the annulus photon screen, and the size of each light penetrating hole is the same as the width of the corresponding etching phase annulus. By using the invention, gauss beams and other wavefront uneven laser beams are transformed into wavefront diffractive beams which are approximate planes.

Description

technical field [0001] The invention relates to the technical field of wavefront shaping of laser beams, in particular to a wavefront flattening of a Gaussian wavefront and an irregular wavefront laser beam in the far-field diffraction light field, that is, to realize a light field close to a plane wavefront distribution An array ring-band photon sieve homogenizer and a manufacturing method thereof. The array annular photon sieve homogenizer can be used in beam shaping, microelectronics maskless etching and other various optical paths that require a plane wave front. Background technique [0002] It is a practical subject to homogenize the laser beam with Gaussian wavefront and irregular wavefront through various ways, so that the beam can be transformed into a beam close to the plane wavefront, and it has a wide range of applications in various optical paths, such as in beam shaping , Microelectronics maskless lithography and other various instruments that require a planar...

AI Technical Summary

Problems solved by technology

The kaleidoscope method is easy to manufacture and adjust, the cost is greatly reduced, and the size of the output spot can be easily changed, but the transmission loss of this system is relatively large

[0008] Cylindrical mirror method: The principle of the method is to form a hollow square structure surrounded by four cylindrical mirrors. Each cylindrical mirror is installed on a fine adjustment frame. The size and shape of the hollow part can be controlled through adjustment. The laser is irradiated on the device Above, the hollow part of the laser passes through directly, and the light irradiated on the edge cylindrical lens will compensate for the weak light intensity part of the middle light. By calculating the parameters of the cylindrical lens and adjusting the adjustment knob properly, the uniform light effect can be obtained. The advantage of this method is that the beam transmittance is higher and the uniform light effect is better, but the designer has higher requirements, and the designer needs to calculate the lens parameters and design a high-precision fine-tuning mechanism

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