Array two-ring phase-ring light uniformity device and manufacturing method whereof

Abstract

The present invention discloses an array two-ring phase-ring light uniformity device, which is characterized in that: the array two-ring phase-ring light uniformity device is an array with a structure of two-ring phase ring on a transparent medium manufactured according to the practical need, wherein, the size of the array is given according to the practical need; the two-ring phase ring is the basic unit of the array type dodging device; two-ring phase ring is a phase plate with a concentric two-ring structure manufactured on a transparent substrate; the radius of the outermost ring is given by the practical optical path; the radius of the inner ring is 0.36 times the radius of the outer ring; the phase of the inner ring is Pi; the phase of the outer ring is 0; the other parts are lightproof. The present invention simultaneously discloses a method for manufacturing array two-ring phase-ring light uniformity device. The invention can implement the wavefront flatting of Gaussian beam and other nonuniform non-planar wavefront beams, and also can implement the dodging of light beam and the wavefront beam approaching the plane, wherein the wavefront beam has a wide application in optical path system.

Description

technical field [0001] The invention relates to the technical field of wavefront shaping of laser beams, in particular to a wavefront flattening of a Gaussian wavefront and an irregular wavefront laser beam in the far-field diffraction light field, that is, to realize a light field close to a plane wavefront distribution An array 2-ring phase ring homogenizer and a manufacturing method thereof. The array 2-ring phase ring homogenizer can be used in beam shaping, microelectronic maskless etching and other various optical paths that require a plane wave front. Background technique [0002] It is a practical subject to homogenize the laser beam with Gaussian wavefront and irregular wavefront through various ways, so that the beam can be transformed into a beam close to the plane wavefront, and it has a wide range of applications in various optical paths, such as in beam shaping , Microelectronics maskless lithography and other various instruments that require a planar wavefron...

AI Technical Summary

Problems solved by technology

The kaleidoscope method is easy to manufacture and adjust, the cost is greatly reduced, and the size of the output spot can be easily changed, but the transmission loss of this system is relatively large

[0008] Cylindrical mirror method: The principle of the method is to form a hollow square structure surrounded by four cylindrical mirrors. Each cylindrical mirror is installed on a fine adjustment frame. The size and shape of the hollow part can be controlled through adjustment. The laser is irradiated on the device Above, the hollow part of the laser passes through directly, and the light irradiated on the edge cylindrical lens will compensate for the weak light intensity part of the middle light. By calculating the parameters of the cylindrical lens and adjusting the adjustment knob properly, the uniform light effect can be obtained. The advantage of this method is that the beam transmittance is higher and the uniform light effect is better, but the designer has higher requirements, and the designer needs to calculate the lens parameters and design a high-precision fine-tuning mechanism

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