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Discharging lamp

A technology for discharge lamps and discharge vessels, applied to components of gas discharge lamps, etc., can solve problems such as insufficient ultraviolet light output, achieve excellent corrosion resistance, prevent unevenness, and suppress the effect of reducing reflectivity

Inactive Publication Date: 2011-05-25
USHIO DENKI KK
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0005] The above-mentioned discharge lamp has been mainly used as a light source for irradiating vacuum ultraviolet rays on the surface of a target object such as a liquid crystal substrate to modify the surface of the object to be processed, but for PSA applications, the wavelength required to polymerize monomers is 300 to 300 GHz. The output of ultraviolet rays in the wavelength range of 380nm is not sufficient

Method used

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Examples

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Effect test

Embodiment 1

[0054] For discharge lamps having the above specifications, discharge lamps were prepared in which the thickness of the ultraviolet reflecting layer was 30 μm, and the thickness of the film was changed to 3 μm, 5 μm, 10 μm, 15 μm, or 20 μm. Ten discharge lamps of each film thickness were produced, and whether or not the film came off was confirmed. When the produced discharge lamp was visually checked, a state in which small pieces of the thin film of about several mm fell off and were scattered inside the lamp was regarded as falling off. The measurement results are shown in Table 2.

[0055] 【Table 2】

[0056]

[0057] From figure 2 From the results shown, it can be seen that when the thickness of the film is 10 μm or less, peeling does not occur. In addition, it can also be seen that in the course of the experiment, when the thickness is less than 3 μm, the ultraviolet reflective layer has a part not covered by the film, and it is easy to produce uniformity. From th...

Embodiment 2

[0059]As for the discharge lamp used in Example 1, a discharge lamp having an ultraviolet reflection layer having a thickness of 30 μm and a film thickness of 3 μm was prepared as the discharge lamp of the present invention. In addition, a discharge lamp different in that no thin film was formed but only a 30-μm-thick ultraviolet reflection layer was formed on the inner surface of the discharge vessel was prepared as a comparison discharge lamp.

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Abstract

The invention provides a discharging lamp for providing a light source suitable for PSA use, which effectively emits ultraviolet rays in wavelength range of 300-380nm required by monomer polymerization. The discharging lamp (10) comprises a discharging container (20) containing iodine used as a light emitting gas, and a pair of electrodes (11, 12), formed on the outer surface of the discharging container, which emits ultraviolet rays with peak wavelength of 342nm by forming excited iodine molecules, wherein an ultraviolet ray reflecting layer (30) composed of small silicon dioxide particles is formed on the inner surface of the discharging container (20), and a film (40) is formed at the position which is on the surface of the ultraviolet ray reflecting layer (30) and conflicts with discharging path of the pair of electrodes (11, 12).

Description

technical field [0001] The present invention relates to a discharge lamp comprising a discharge vessel containing iodine as a luminescent gas and a pair of electrodes formed on the outer surface of the discharge vessel, and emitting ultraviolet rays emitted by forming excited iodine molecules. Background technique [0002] In the manufacturing process of a liquid crystal display, a technology is adopted in which a monomer (monomer) is mixed into the liquid crystal when constituting a pixel of the liquid crystal, and the tilt direction of the liquid is fixed by polymerizing the monomer in a state where the liquid crystal molecules are tilted. (PSA: Polymer Sustained Alignment, polymer stabilized alignment). According to Patent Document 1 disclosing PSA, considering the small damage to liquid crystal, the sensitivity of the monomer, the transmittance of the glass for liquid crystal, etc., it is preferable that the light source for polymerizing the monomer irradiates the monome...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): H01J61/35
Inventor 松泽聪司沟尻贵文
Owner USHIO DENKI KK
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