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Production process for amorphous silicon solar cell

A solar cell and production process technology, applied in the field of solar photovoltaics, can solve problems such as the increase of internal sub-cell series resistance and the impact on the overall performance of the battery, achieve good internal series effect, improve fill factor and short-circuit current, and increase battery power Effect

Inactive Publication Date: 2011-06-01
TIANJIN JINNENG SOLAR CELL
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

Since the conductivity of ZnO is lower than that of the front electrode transparent conductive film SnO 2 , figure 2 The series path in the structure increases the series resistance of the internal sub-cell connection, which affects the overall performance of the battery

Method used

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  • Production process for amorphous silicon solar cell
  • Production process for amorphous silicon solar cell
  • Production process for amorphous silicon solar cell

Examples

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Embodiment Construction

[0021] The present invention will be described in further detail below through specific implementation. The following examples are only descriptive, not restrictive, and cannot limit the protection scope of the present invention with this.

[0022] A production process for amorphous silicon solar cells is to carry out the second laser scribing after the growth of a-Si and ZnO, and then sputter the Al electrode. After the improvement, the whole solar cell structure is as follows image 3 As shown, the process steps included are:

[0023] (1) SnO 2 Laser scribing of transparent conductive film, scoring line 1;

[0024] (2) Depositing an amorphous silicon film;

[0025] (3) Sputtering ZnO;

[0026] (4) laser scribes the amorphous silicon film and the ZnO film, scribed line 2;

[0027] (5) Sputtering the AL electrode, the AL passes through the groove of the scribed line 2 and the SnO 2 Membrane connected, series pathway line 4;

[0028] (6) The AL film is laser scribed, and...

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Abstract

The invention relates to a production process for an amorphous silicon solar cell. The production process comprises the following process steps of: performing laser scoring on a transparent SnO2 conductive film; (2) depositing an amorphous silicon film; (3) sputtering ZnO; (4) performing the laser scoring on the amorphous silicon film and the ZnO film; (5) sputtering an AL electrode which is communicated with the SnO2 film through a scoring groove of a score line in the step (4); and (6) performing the laser scoring on an AL film so that each subcell is insulated at the electrode. The production process changes the production procedures of secondary laser scoring and sputtering, so that an internal serial-connection effect of cells is better; the series resistance of the cells is effectively reduced; and the cell power is improved.

Description

technical field [0001] The invention belongs to the field of solar photovoltaic technology, and relates to a process for producing an amorphous silicon solar cell. Background technique [0002] A solar cell is a semiconductor photovoltaic device that uses the principle of "photovoltaic effect" to directly convert solar energy into electrical energy. Amorphous silicon solar cells are a kind of thin-film batteries. figure 1 shown. [0003] The main process steps are: (1).SNO 2 Laser scribing of transparent conductive film, scoring line 1; (2). Depositing amorphous silicon film; (3). Laser scribing amorphous silicon film, scoring line 2; (4). Sputtering aluminum electrodes, aluminum passing through Grooving and SNO for scribe line 2 2 The membranes are connected to form a series path line 4, which connects each sub-battery in series; (5). The AL membrane is laser scribed, and the scribed line 3 insulates each sub-battery at the electrode. [0004] No matter in the research ...

Claims

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Application Information

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IPC IPC(8): H01L31/20H01L31/0224H01L31/05
CPCY02E10/50Y02P70/50
Inventor 张亚萍郭增良
Owner TIANJIN JINNENG SOLAR CELL