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Preparation method of magnetic multilayer-film nano bowl monolayer array

A multi-layer film and nanobowl technology, applied in the application of magnetic film to substrate, nanostructure manufacturing, nanotechnology, etc., can solve the problems of incompatibility of production process and so on

Inactive Publication Date: 2013-12-18
JILIN NORMAL UNIV
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

The currently reported preparation methods are mainly chemical methods, which are not compatible with the current large-scale industrial production processes

Method used

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  • Preparation method of magnetic multilayer-film nano bowl monolayer array
  • Preparation method of magnetic multilayer-film nano bowl monolayer array
  • Preparation method of magnetic multilayer-film nano bowl monolayer array

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Experimental program
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Embodiment Construction

[0019] The principle on which the present invention is based is:

[0020] (1) There is weak van der Waals force between the colloidal array prepared by the self-assembly method and the substrate, and it is easy to fall off.

[0021] (2) Thin films are deposited on the colloid array. When the thickness of the film is smaller than the radius of the colloid balls, the film is not connected to the substrate, and the thickness of the film between the balls is very small.

[0022] The preparation method of this nanobowl monolayer array comprises the following steps:

[0023] attached by figure 1 , 2 Shown: first utilize self-assembly technology to prepare two-dimensional colloidal ball array on silicon substrate;

[0024] attached by image 3 , 4 , Shown in 5: depositing [Co / Pt] on the colloidal ball array by magnetron sputtering technique 15 multi-layer film, making the top of the colloidal ball form an inverted bowl-shaped structural layer ( image 3 , 4 ), the multi-film-...

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Abstract

The invention relates to a preparation method of a magnetic multilayer-film nano bowl monolayer array, specifically comprising the steps of: firstly, preparing a two-dimensional colloid sphere array on a silicon or glass or ITO (Indium Tin Oxide) substrate by adopting a self-assembly technology, then, depositing multi-layer Co / Pt membranes on the colloid sphere array with a sputtering technology, transferring the colloid sphere array growing with the multi-layer membranes to the other substrate, and finally removing colloid spheres by using a selective etching technology to form a nano bowl array on the new substrate. The array is widely applied to the fields of microbiology, pharmacology, high-density magnetic storage, microfluidics and the like.

Description

technical field [0001] The invention relates to a method for preparing a single-layer array of magnetic multilayer film nanobowls. The array is widely used in the fields of microbiology, pharmacology, high-density magnetic storage, microfluidics and the like. Background of the invention [0002] Magnetic nanobowl arrays have important application prospects in microbiology, pharmacology, high-density magnetic storage, and microfluidics. The currently reported preparation methods are mainly chemical methods, which are not compatible with the current large-scale industrial production processes. The material prepared at the same time is also relatively simple, with Co or Fe 2 o 3 A single material is the main constituent material. In practical applications, multi-layer films or alloy materials with various functions have more important and wider application prospects. Contents of the invention [0003] The purpose of the present invention is to adopt colloidal sphere self-...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): H01F41/14H01F41/18B82B3/00C23C14/34C23C14/16C23C14/18
Inventor 王雅新张永军丁雪杨艳婷杨景海
Owner JILIN NORMAL UNIV