Large-irradiation-area atomic oxygen beam simulation system
A simulation system, atomic oxygen technology, applied in the field of simulation system, can solve the problems of inability to carry out test verification, low test efficiency, restricting the application of test technology, etc., to shorten the test period, reduce the test cost, and improve the test efficiency.
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[0024] Use this set of atomic oxygen beam simulation system with large irradiation area, install and debug on the Φ500mm×600mm vacuum container, and build the ground simulation test equipment for atomic oxygen environment. The atomic oxygen beam simulation system is connected to the main container through a Φ150mm flange.
[0025] According to the above method and steps, the atomic oxygen beam simulation system with a large irradiation area is built, in which the vacuum chamber of the device is welded by non-magnetic stainless steel plates with a thickness of 4-5mm, which can withstand the internal and external pressure difference brought by high vacuum, and can Avoid the influence of the magnetization of the anti-electric cavity on the plasma anti-electricity. A microwave antenna window, an observation window, a molybdenum plate installation window, a molybdenum plate azimuth adjustment window, a connection window with the main container, and an electrostatic probe window are...
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