The invention discloses an oxygen generating equipment system and a process flow thereof. The oxygen generating equipment system comprises an air compressor, a high-efficiency degreaser, a precision filter, a micro heat regeneration drier, a dust fine filter A, an active carbon filter, a buffer air storage tank, oxygen generating equipment, a dust fine filter B, an oxygen storage tank and a sterilizing filter which are sequentially connected. The oxygen generating equipment system disclosed by the invention reduces the requirements on installation and using environments by adopting the micro heat regeneration drier, thereby being high in safety. According to the oxygen generating equipment system, compressed air is clean by utilizing a multi-purification device, so that the adsorption capacity and service life of a zeolite molecular sieve are effectively ensured, and resources are saved; oxygen with the purity of 90%-93% can be continuously produced through the alternate adsorption of two adsorption towers, the output of the oxygen is 12 Nm<3> / h, and the delivery pressure of the oxygen is 0.3 MPa.