Post-processing approach for improving lager-area carbon nanotube cathode field emission uniformity
A carbon nanotube cathode and carbon nanotube technology, applied in cold cathode manufacturing, discharge tube/lamp manufacturing, electrode system manufacturing, etc., can solve the problems of inability to selectively remove carbon nanotubes, high power, low efficiency, etc. , to achieve the effect of realizing large-area rapid processing, realizing in-situ selective processing, and improving the uniformity of field emission
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[0033] The present invention will be further described below in conjunction with accompanying drawing:
[0034] Such as figure 1 as shown, figure 1 It is a schematic diagram of the processing device adopted in the post-processing method of the present invention, wherein, 1 is an ITO flat conductive glass, 2 is a cathode mounting frame, 3 is a carbon nanotube cathode, 4 is a vacuum chamber, 5 is an air intake valve, and 6 is an exhaust valve. Air valve, 7 is a power supply, 8 is a video camera, and 9 is a monitoring screen.
[0035]In this embodiment, the carbon nanotube cathode 3 is used as the carbon nanotube film. The carbon nanotube film is a 5-inch carbon nanotube lattice sample prepared on a silicon wafer substrate by a thermal chemical vapor deposition method, the image point diameter is 200 μm, and the total number of lattices is 19,200. The microscopic morphology of the carbon nanotube film is shown in Fig. 2(a). It can be seen from the figure that the height distr...
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