A rework process for texturing monocrystalline silicon wafers with white spots
A technology of white spot single crystal and single crystal silicon wafer, applied in sustainable manufacturing/processing, crystal growth, final product manufacturing, etc., can solve the problem of low success rate of rework and achieve the effect of improving the yield rate
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[0020] The reworking process of texturizing monocrystalline silicon wafers with white spots proposed by the present invention will be further described in detail below in conjunction with the accompanying drawings and specific examples. Advantages and features of the present invention will be apparent from the following description and claims. It should be noted that all the drawings are in very simplified form and use imprecise ratios, which are only used for the purpose of conveniently and clearly assisting in describing the embodiments of the present invention.
[0021] The core idea of the present invention is that the rework process of the monocrystalline silicon wafer with white spot is provided. By performing high temperature treatment on the single crystal silicon wafer with white spot, the remaining impurities on the surface are volatilized, and the single crystal silicon wafer with white spot is removed. It is conducive to corrosion in the advanced texturing proces...
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